Curvature Radius Measurement Diffracted Light Array
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing methods for measuring the curvature radius of thin films, such as single spot line scanning and parallel light array methods, face challenges with long measurement times and environmental interference, and require high-cost optical devices with stringent requirements for laser intensity, sensor sensitivity, and sample reflectivity.
Innovation Solution
A device comprising a sample stage, a diffracted light array generation module, and a detection and analysis module that emits a diffracted light array perpendicular to the sample stage, allowing for the calculation of curvature radius using a single-point measurement with a formula that accounts for optical parameters, and includes a semi-reflecting and semi-transmitting lens to enhance measurement accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If single spot line scanning method is used, then measurement accuracy can be achieved, but measuring time is long (greater than 20 seconds) and environmental vibration interferes with measurement results
Solution Approach 1:
The patent divides a single measurement task into multiple parallel light spots (array of light spots). Instead of scanning one spot sequentially across the sample surface, multiple light spots simultaneously illuminate different regions, enabling parallel data acquisition. This segmentation of the measurement function into parallel channels directly reduces measurement time while maintaining accuracy through multiple simultaneous measurements.
Solution Approach 2:
The patent transitions from one-dimensional sequential scanning to two-dimensional parallel array measurement. By arranging light spots in an array configuration across the sample surface, the system captures curvature information from multiple locations simultaneously, adding a spatial dimension to the measurement approach and eliminating the time penalty of sequential scanning.
2Productivity
If parallel light array method is used to reduce measuring time, then measurement speed improves, but high-quality parallel light spot array is required which demands high manufacturing cost for optical devices
Solution Approach 1:
The patent introduces a diffractive optical element as an intermediary component that transforms a single laser beam into a parallel light spot array. This diffractive element acts as a mediator between the simple laser source and the required parallel illumination pattern, achieving the complex light distribution without needing complex optical systems. The diffractive element is relatively inexpensive and easy to manufacture compared to traditional high-precision optical arrays.
Solution Approach 2:
The patent replaces expensive, high-precision optical components with a relatively simple and inexpensive diffractive optical element. This element can be manufactured using standard techniques and is much more cost-effective than traditional optical systems that would be required to generate a parallel light array with equivalent precision. The trade-off favors a lower-cost component that achieves the same functional result.
3Loss of time
If parallel light array method is used, then single-point measurement is achieved, but brightness at the end of beam is low requiring higher laser intensity and sensor sensitivity
Solution Approach 1:
The patent merges multiple light paths into a single detection channel. By using a imaging lens to focus reflected light from all light spots onto a linear array sensor, the system combines the optical signals from multiple parallel beams. This merging of optical paths maintains adequate brightness at the detection plane by concentrating the reflected light from multiple spots onto the sensor array, rather than distributing it too thinly.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables faster and more accurate measurement of curvature radius with reduced environmental interference, balancing measurement accuracy and manufacturing cost by using a diffracted light array and a sensor imaging screen to convert optical signals into electrical signals for curvature radius calculation.
Implementation Method 1
a diffracted light array generation module configured to generate and emit a diffracted light array to the sample
Implementation Method 2
the sensor imaging screen is configured to receive the reflected light array emitted from the sample and to convert an optical signal of the reflected light array into an electrical signal
Implementation Method 3
A measuring beam is reflected by a surface of a deformed sample
Data Source
AI summary
A device for measuring a curvature radius includes a sample stage configured to support a sample to be measured, a diffracted light array generation module configured to generate and emit a diffracted light array to the sample, and a detection and analysis module configured to receive a reflected light array emitted from the sample and to obtain the curvature radius of the sample according to a dimension of the received reflected light array. Also disclosed is a method for measuring the curvature radius.