Curved 3D Optical Waveguide for Semiconductor Miniaturization
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Solution Overview
Problem
Existing semiconductor devices with optical waveguides face challenges in miniaturization and optical loss reduction, particularly in three-dimensional configurations, where high alignment accuracy and complex manufacturing processes hinder the integration and efficiency of optical circuits.
Innovation Solution
A semiconductor device is designed with a planar optical waveguide and a stereoscopically curved three-dimensional optical waveguide, eliminating the need for grating couplers, which allows for improved miniaturization and reduced optical loss by using nanoimprint technology to form the curved waveguide, enabling better integration and alignment freedom.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If a three-dimensional optical waveguide is formed to realize miniaturization, then the degree of integration and mounting freedom are improved, but optical loss increases
Solution Approach 1:
The patent transitions from planar two-dimensional optical waveguides to three-dimensional optical waveguides with vertical components. The optical waveguide extends in the vertical direction (z-axis) with a curved trajectory, allowing light to propagate through multiple layers and directions, thereby achieving compact integration while maintaining optical performance through careful design of the three-dimensional path.
Solution Approach 2:
The optical waveguide is designed with a curved shape in three-dimensional space, following a smooth trajectory that connects different functional regions. This curved configuration allows the waveguide to navigate around other components and maintain optimal light propagation paths, reducing bending losses while achieving compact packaging.
2Loss of energy
If high alignment accuracy is required for three-dimensional optical waveguide connection, then optical loss is reduced, but manufacturing complexity increases
Solution Approach 1:
The patent employs self-alignment mechanisms where the optical waveguide is directly integrated with the substrate and other components through the same manufacturing process. The waveguide structure is formed to automatically align with connection points, eliminating the need for separate high-precision alignment steps and reducing manufacturing complexity while maintaining low optical loss.
Solution Approach 2:
The patent combines the optical waveguide formation with the substrate fabrication process, integrating multiple functions into a unified manufacturing flow. The waveguide, substrate, and connection structures are formed simultaneously or in sequence without requiring separate alignment operations, thereby simplifying the overall manufacturing process.
3Loss of energy
If grating couplers are used for optical connection, then coupling efficiency is improved, but device area increases
Solution Approach 1:
The patent removes the grating coupler component from the optical system, replacing it with a direct end-fire coupling approach. By extracting this bulky component and using vertical edge-emitting laser diodes that couple directly to the optical waveguide, the device achieves efficient coupling without the additional area required for grating structures.
Solution Approach 2:
Instead of using lateral coupling through grating couplers, the patent inverts the coupling approach by using vertical coupling through edge-emitting lasers. This inversion of the coupling geometry allows for more compact integration and eliminates the need for large-area grating structures while maintaining or improving coupling efficiency.
Data Source
AI summary
The semiconductor device includes an optical waveguide WG1 formed in a planar manner, and a three-dimensional optical waveguide WG2 optically connected with the optical waveguide WG1 and including a curved shape.