Curved Back Cavity for MUT Acoustic Resonance Control

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Solution Overview

Problem

Traditional packaging designs for micromachined ultrasonic transducers (MUTs) with rectangular back-cavities generate multiple acoustic resonance modes, leading to reduced output pressure and bandwidth due to standing waves, making it challenging to ensure consistent performance across frequencies and temperatures.

Innovation Solution

The use of curved geometries, such as hemispherical or cylindrical shapes, in the back cavity of the transducer package reduces the number and adjusts the frequency of resonant acoustic modes, minimizing interference with the transducer's operating frequency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a traditional rectangular cavity is used in the transducer package, then the packaging structure is simple and easy to manufacture, but multiple acoustic resonance modes are generated that reduce output pressure and bandwidth

Engineering Contradiction:
Improvepackaging structure simplicityVSAvoidtransducer performance consistency
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent applies curvature by replacing the traditional rectangular back-cavity with a hemispherical geometry. This curved surface design reduces the number of acoustic resonance modes from multiple (in rectangular) to a single mode, thereby eliminating standing wave interference and improving transducer performance consistency across frequencies and temperatures.

Inventive Principle:
Principle #14Spheroidality (Curvature)

2Device complexity

If a rectangular back-cavity is used, then the package dimensions are easy to define, but standing waves are generated that significantly reduce output pressure and bandwidth

Engineering Contradiction:
Improvecavity geometry complexityVSAvoidtransducer output pressure and bandwidth
Core Design Contradiction:
Device complexityVSProductivity

Solution Approach 1:

The hemispherical back-cavity geometry is implemented to eliminate standing wave patterns that occur in rectangular cavities. This curved design reduces acoustic resonance from multiple modes to a single mode, significantly improving output pressure and bandwidth by preventing destructive interference of acoustic waves.

Inventive Principle:
Principle #14Spheroidality (Curvature)

3Volume of stationary object

If traditional packaging dimensions are used, then the package size is compact, but acoustic resonance modes at incorrect frequencies reduce transducer performance

Engineering Contradiction:
Improvepackage sizeVSAvoidperformance across frequencies and temperatures
Core Design Contradiction:
Volume of stationary objectVSReliability

Solution Approach 1:

The hemispherical back-cavity design maintains compact packaging dimensions while fundamentally changing the acoustic resonance characteristics. By curving the cavity surfaces, the design reduces resonance modes from multiple to one, allowing consistent transducer performance across a range of frequencies and temperatures.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces the number of acoustic resonances and flattens the frequency response, allowing for improved transducer performance by shifting resonant modes outside the operating frequency band, thereby enhancing output pressure and bandwidth consistency.

Implementation Method 1

the design of the back-cavity on the enclosed side of the membrane has a strong effect on transducer performance, particularly the output pressure and bandwidth. Because typical packaging dimensions for MUTs are on the order of a wavelength for transducers operating at ultrasonic frequencies, standing waves are generated in the package back-cavity giving rise to acoustic resonant modes

Methodology Applied
Scientific EffectAcoustic resonance: Resonance

Implementation Method 2

standing waves are generated in the package back-cavity giving rise to acoustic resonant modes

Methodology Applied
Scientific EffectStanding waves: Resonance

Data Source

PatentEP3383556B1Miniature ultrasonic transducer package
Publication Date: 2023.08.02 INVENSENSE INC
  • EP3383556B1 patent drawingFigure 1~2
  • EP3383556B1 patent drawingFigure 5~6

AI summary

A package design for a micromachined ultrasound transducer (MUT) utilizing curved geometry to control the presence and frequency of acoustic resonant modes is described. The approach consists of reducing in number and curving the reflecting surfaces present in the package cavity to adjust the acoustic resonant frequencies to locations outside the band of interest. The design includes a cavity characterized by a curved geometry and a MUT mounted to a side of a substrate facing the cavity with a sound emitting portion of the MUT facing an opening in the substrate. The substrate is disposed over an opening of the cavity with the substrate oriented such that the MUT located within the cavity.