Curved-Surface Beam Manipulator for Multi-Beam Deflection
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Solution Overview
Problem
Implementing charged particle-optical elements for multi-beam systems is challenging, particularly for systems with many beams, due to fabrication difficulties and fragility issues with traditional parallel plate deflectors.
Innovation Solution
The use of curved-surface plates in a beam manipulator to control and deflect charged particle beams in a multi-beam system, allowing for precise adjustment of beam paths without requiring fragile structures or different electrical potentials across the plates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional parallel plate deflectors are used in multi-beam systems, then beam deflection control is achieved, but fabrication difficulty and structural fragility increase significantly
Solution Approach 1:
The patent applies curvature to the deflector plates, transforming them from flat parallel plates to curved surfaces. This curvature enables the plates to deflect multiple beams simultaneously while maintaining structural integrity and reducing fabrication complexity. The curved geometry allows for more robust construction compared to the thin, fragile flat plates required in traditional systems.
2Manufacturing precision
If multiple sets of parallel plate deflectors are used to collimate beams, then beam collimation is improved, but device complexity and fabrication challenges increase
Solution Approach 1:
The patent merges the functions of multiple deflector plates into a single curved-surface plate structure. Instead of using multiple separate sets of parallel plates, the curved surface integrates the deflection functionality for multiple beams into one component, reducing system complexity while maintaining or improving collimation precision.
Solution Approach 2:
The curved-surface plate serves multiple functions simultaneously: it acts as a deflector for multiple beams, provides collimation, and maintains structural integrity. This multi-functional design eliminates the need for separate components that would otherwise be required in traditional systems.
3Ease of operation
If individual plates are made very long and thin to achieve proper beam deflection, then beam control is maintained, but structural fragility and fabrication difficulty increase
Solution Approach 1:
By curving the plate surfaces, the patent achieves effective beam deflection without requiring the plates to be long and thin. The curved geometry provides the necessary deflection capability while allowing for shorter, thicker, and therefore stronger plate construction, significantly improving structural strength and reducing fragility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables effective control of multi-beams by applying deflections through controlled potential differences between the curved surfaces of the plates, improving beam collimation and focusing without the limitations of traditional deflectors.
Implementation Method 1
the beam manipulator is configured to apply deflections to beams of the beam grid by controlling a potential difference applied between the curved surface and the facing surface
Data Source
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AI summary
The present disclosure provides a charged particle element and relates apparatus and methods. In one arrangement, the element comprises a beam manipulator configured to operate on a plurality of charged particle beams in a beam grid. The beam manipulator comprises a plurality of plates. Each plate has two surfaces and a plurality of apertures. The plates comprises at least one curved-surface plate with a curved surface. The curved surface faces a facing surface of an adjacent plate. Deflections are applied to beams by controlling a potential difference between the curved surface and the facing surface.