Curved Mask Projection for Homogeneous Laser Coating

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Solution Overview

Problem

In pulsed laser deposition (PLD), projecting a light beam at an angle onto a surface results in inhomogeneous energy distribution due to the decreasing angle between the beam and the surface, leading to non-homogeneous plasma plumes when coating larger substrates.

Innovation Solution

A device where the distance from the mask to the lens and the corresponding distance of the mask's image to the lens at each edge follow the formula 1/v+1/b=1/f, ensuring a sharp image projection, and a system with movable components to maintain focus while moving the spot along the surface.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If the light beam is projected under an angle onto the surface to coat larger substrates, then the coating area is increased, but the energy distribution becomes inhomogeneous

Engineering Contradiction:
Improvecoating areaVSAvoidenergy distribution homogeneity
Core Design Contradiction:
Area of stationary objectVSManufacturing precision

Solution Approach 1:

The mask is shaped with a curved surface that corresponds to the projection geometry. Specifically, the mask surface is curved such that when projected through the lens onto the surface, it compensates for the angular projection effects, maintaining uniform energy distribution across the expanded coating area.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Solution Approach 2:

Different regions of the mask have different orientations and curvatures tailored to their specific projection requirements. Each local region of the mask is optimized to project uniformly onto its corresponding region on the surface, allowing the entire system to achieve homogeneous energy distribution across the large coating area.

Inventive Principle:
Principle #3Local quality

2Area of stationary object

If the angle between the light beam and the surface decreases to expand coating area, then the substrate coverage is increased, but the spot homogeneity deteriorates

Engineering Contradiction:
Improvesubstrate coverageVSAvoidspot homogeneity
Core Design Contradiction:
Area of stationary objectVSStability of the object's composition

Solution Approach 1:

The mask employs a curved surface geometry that counteracts the angular projection effects. The curvature is specifically designed so that rays projecting at different angles from different parts of the mask all converge to form a homogeneous spot on the surface, maintaining spot quality even as substrate coverage is expanded.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Solution Approach 2:

The mask geometry parameters (curvature radius, orientation angles, surface profile) are specifically optimized to compensate for the angular projection. By adjusting these geometric parameters, the system maintains spot homogeneity while enabling projection onto larger substrate areas at reduced angles.

Inventive Principle:
Principle #35Parameter changes

3Ease of manufacture

If a flat mask is used for simple manufacturing, then the manufacturing ease is improved, but the image sharpness on angled surfaces deteriorates

Engineering Contradiction:
Improvemask fabrication simplicityVSAvoidimage sharpness
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The mask surface is formed with a curved profile that matches the projection geometry requirements. This curvature can be achieved through various manufacturing techniques such as precision molding, CNC machining, or glass blowing, balancing the need for optical precision with manufacturability. The curved mask ensures sharp image projection onto surfaces viewed at angles while remaining feasible to produce.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach achieves a homogeneous energy distribution and allows for precise, high-speed coating of larger surfaces with flexible spot movement, independent of the prior art's limitations.

Implementation Method 1

a lens arranged behind the mask to focus the image of the mask on a surface

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 2

a lens arranged behind the mask to focus the image of the mask on a surface

Methodology Applied
Scientific EffectFocusing: Focusing

Implementation Method 3

a light source generating a light beam; a mask arranged in the path of the light beam... the light beam is projected under an angle onto a surface of an ablatable material. The projected image is a spot in which the energy of the laser light beam is concentrated. This energy causes the material of the surface to evaporate into a plasma plume

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 4

This energy causes the material of the surface to evaporate into a plasma plume

Methodology Applied
Scientific EffectAblation: Ablation

Implementation Method 5

a mask arranged in the path of the light beam... the mask is a flat plate having an opening through which the light beam runs and wherein the flat plate is arranged under an angle with the lens

Methodology Applied
Scientific EffectGeometric projection: Geometry

Data Source

PatentUS8979282B2Device for projecting an image on a surface and device for moving said image
Publication Date: 2015.03.17 LAM RES CORP
  • US8979282B2 patent drawing
  • US8979282B2 patent drawing
  • US8979282B2 patent drawing

AI summary

The invention relates to a device for projecting an image on a surface, comprising: a light source generating a light beam; a mask arranged in the path of the light beam; a lens arranged behind the mask to focus the image of the mask on a surface, wherein the surface is not parallel to the lens, wherein at substantially each position along the edges of the mask the distance v to the lens and the distance b of the corresponding position at the edges of the image of the mask to the lens correspond substantially to the formula 1/v+1/b=1/f, wherein f is the focal length of the lengths. The invention also relates to a device for moving the image on the surface.