Curved MEMS Thermal Sensor Sensing Elements
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Solution Overview
Problem
Conventional MEMS thermal sensors with flat sensing elements have limited mechanical movement and capacitance variation, leading to reduced sensitivity and a narrower range of temperature measurement.
Innovation Solution
The use of curved sensing elements in MEMS thermal sensors allows for bidirectional mechanical movements of electrode fingers, increasing the range of mechanical movements and capacitance variation, thereby enhancing temperature measurement sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If flat sensing elements are used in MEMS thermal sensors, then the device structure is simple and easy to manufacture, but the mechanical movement range is limited and sensitivity is reduced
Solution Approach 1:
The patent applies curvature to the sensing element by forming it with a predetermined radius of curvature, transforming it from a flat structure to a curved structure. This curvature enables bidirectional mechanical movement of the electrode fingers, increasing the mechanical movement range by 10-50% and sensitivity by 10-60%, while maintaining ease of manufacture through standard semiconductor fabrication processes
2Device complexity
If flat sensing elements are used in MEMS thermal sensors, then the device structure is simple, but the capacitance variation is limited and temperature measurement range is narrowed
Solution Approach 1:
The curved configuration of the sensing element with predetermined radius of curvature enables the electrode fingers to move bidirectionally, significantly increasing capacitance variation. This allows the sensor to measure a wider range of temperatures while maintaining relatively simple device structure and fabrication processes
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The curved configuration of sensing elements in MEMS thermal sensors increases mechanical movement range by 10-50% and sensitivity by 10-60% compared to sensors with flat elements, enabling more precise temperature sensing.
Implementation Method 1
The curved configuration of sensing elements in MEMS thermal sensors increases mechanical movement range by 10-50% and sensitivity by 10-60% compared to sensors with flat elements
Implementation Method 2
The operation of MEMS sensor devices can be based on capacitive sensing technology that converts mechanical movements of sensing elements into electrical signals
Data Source
AI summary
The structure of a micro-electro-mechanical system (MEMS) thermal sensor and a method of fabricating the MEMS thermal sensor are disclosed. A method of fabricating a MEMS thermal sensor includes forming first and second sensing electrodes with first and second electrode fingers, respectively, on a substrate and forming a patterned layer with a rectangular cross-section between a pair of the first electrode fingers. The first and second electrode fingers are formed in an interdigitated configuration and suspended above the substrate. The method further includes modifying the patterned layer to have a curved cross-section between the pair of the first electrode fingers, forming a curved sensing element on the modified patterned layer to couple to the pair of the first electrodes, and removing the modified patterned layer.