Curved-Mirror Optical Layout for Stable Excimer Laser Annealing
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Solution Overview
Problem
Existing optical systems for excimer laser annealing in manufacturing processes, such as for organic light emitting display devices, face issues with beam dispersion and equipment size due to the need for complex setups to stabilize laser beams, which can lead to defects and increased costs.
Innovation Solution
An optical system comprising a first lens, a second lens, and a curved mirror, where the curved mirror reflects the laser beam to change its path, enhancing beam dispersion while minimizing equipment size by omitting additional parts required for beam stabilization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If complex optical systems with multiple lenses are used to stabilize laser beams, then beam stability is improved, but device complexity and equipment size increase
Solution Approach 1:
The patent extracts and eliminates unnecessary optical components from the beam stabilization system. By using a simplified optical system with only two lenses instead of multiple lenses, the patent removes redundant elements while maintaining the core function of stabilizing the laser beam for excimer laser annealing processes.
Solution Approach 2:
The two lenses in the simplified optical system are designed to perform multiple functions simultaneously: beam stabilization, focusing, and shaping. This multi-functionality allows the system to achieve the same beam stability as complex systems without requiring additional specialized components.
2Reliability
If multiple optical lenses are used to remove laser beam shaking, then beam stability is improved, but light efficiency decreases
Solution Approach 1:
The patent removes redundant optical lenses from the system that were previously used for beam stabilization. By extracting only the essential two lenses needed for the excimer laser annealing process, the system minimizes light loss while maintaining beam stability, thereby improving overall light efficiency.
3Reliability
If complex optical systems are used to stabilize laser beams, then beam stability is improved, but space requirements increase
Solution Approach 1:
The patent extracts and eliminates unnecessary optical components and their associated mounting structures from the beam stabilization system. This reduction in component count directly decreases the spatial footprint of the equipment, allowing for more compact manufacturing process integration.
Solution Approach 2:
The patent merges the functions of multiple separate optical components into a simplified two-lens system. By combining beam stabilization, focusing, and shaping functions into fewer integrated elements, the overall equipment space required is reduced while maintaining operational effectiveness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution improves beam dispersion and reduces equipment size and costs by optimizing the optical system's design, ensuring effective crystallization processes without defects in semiconductor layers like amorphous silicon.
Implementation Method 1
the curved mirror may change the traveling path of the first laser beam to enter the second lens by reflecting the first laser beam
Data Source
AI summary
An optical system includes a first lens including a first surface and a second surface opposite to the first surface and having a first focal length, a second lens including a third surface and a fourth surface opposite to the third surface and having a second focal length, and a curved mirror disposed on a traveling path of a first laser beam passing through the first lens and changing the traveling path of the first laser beam to enter the second lens by reflecting the first laser beam.