Curved Optical Probe Interface for Misalignment-Tolerant Measurement

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Solution Overview

Problem

The measurement of optical semiconductor elements using optical probes is affected by positional deflection and angular deviation between the optical semiconductor element and the optical probe, leading to fluctuations in optical signal power and decreased measurement accuracy.

Innovation Solution

The optical probe features a curved incident surface with a specific radius of curvature and central half angle, defined by the formulae R=Se/sin(ω) and ω=±sin−1{[K2²/(K1²+K2²)]¹/²}, which optimizes the entry of optical signals into the core part, minimizing transmission loss and maintaining signal stability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a flat incident surface is used in the optical probe, then the structure is simple and easy to manufacture, but positional deflection and angular deviation cause fluctuations in optical signal power, decreasing measurement accuracy

Engineering Contradiction:
Improvemeasurement accuracyVSAvoidincident surface structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent applies curvature to the incident surface of the optical probe by forming a convex curved surface with a specific radius of curvature. This curved surface design allows the optical probe to accommodate positional deflection and angular deviation while maintaining stable optical signal transmission, thereby improving measurement accuracy without requiring complex alignment mechanisms

Inventive Principle:
Principle #14Spheroidality (Curvature)

Solution Approach 2:

The patent optimizes the radius of curvature parameter of the incident surface to match the numerical aperture and beam characteristics of the optical signal. By carefully selecting the radius of curvature value, the system achieves optimal coupling efficiency and signal stability, resolving the contradiction between measurement precision and structural complexity

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If alignment mechanisms are added to reduce positional deflection and angular deviation, then measurement accuracy improves, but device complexity and measurement time increase

Engineering Contradiction:
Improvemeasurement accuracyVSAvoidmeasurement time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent performs preliminary alignment by designing the incident surface curvature and positioning structure to pre-compensate for expected positional deflections and angular deviations. This preliminary configuration eliminates the need for complex real-time alignment mechanisms during measurement, thereby reducing measurement time while maintaining high accuracy

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The curved incident surface inherently provides tolerance to misalignment by focusing optical signals even when slight positional deflections or angular deviations occur. This geometric solution replaces complex mechanical alignment systems, reducing both device complexity and measurement time while improving accuracy

Inventive Principle:
Principle #14Spheroidality (Curvature)

3Measurement precision

If the optical probe is positioned closer to the optical semiconductor element, then measurement accuracy improves, but the risk of positional deflection and angular deviation increases

Engineering Contradiction:
Improvemeasurement accuracyVSAvoidsignal stability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The convex curved incident surface is designed with a radius of curvature that optimizes light gathering and focusing capabilities. This curvature allows the probe to maintain stable optical coupling at close distances while inherently compensating for small positional deflections and angular deviations, thereby simultaneously improving accuracy and maintaining signal stability

Inventive Principle:
Principle #14Spheroidality (Curvature)

Solution Approach 2:

The patent optimizes the radius of curvature parameter based on the numerical aperture of the optical semiconductor element and the working distance. This parameter optimization ensures maximum light coupling efficiency at close proximity while maintaining tolerance to alignment variations, resolving the contradiction between accuracy and reliability

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design allows for accurate and stable measurement of optical semiconductor elements with reduced measurement time, enhancing measurement accuracy and reducing positional and angular deviations.

Implementation Method 1

an incident surface which is curved and has a radius of curvature R through which an optical signal L enters

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentUS12360155B2Optical probe, probe card, measuring system, and measuring method
Publication Date: 2025.07.15 NIHON MICRONICS KK
  • US12360155B2 patent drawing
  • US12360155B2 patent drawing
  • US12360155B2 patent drawing

AI summary

An optical probe includes a core part and a clad part arranged along an outer circumference of the core part, and has an incident surface having a radius of curvature R through which an optical signal enters. The radius of curvature R and a central half angle ω at an incident point of the optical signal on the incident surface fulfil the following formulae using a radiation angle γ of the optical signal, an effective incident radius Se of the optical signal transmitted in the core part without penetrating into the clad part on the incident surface, a refractive index n(r) of the core part at the incident point, and a refracting angle β at the incident point:R=Se/sin(ω)ω=±sin−1{[K22/(K12+K22)]1/2}where K1=n(r)×cos(β)−cos(γ/2) and K2=n(r)×sin(β)−sin(γ/2).