Curved Photodetector Structure for Back Reflection Suppression

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Solution Overview

Problem

Conventional photodetectors in photonics chips suffer from significant back reflection due to refractive index mismatch, leading to reduced responsivity and quantum efficiency, and have a large device footprint that degrades optical-to-electrical bandwidth.

Innovation Solution

A structure featuring a waveguide core with a light-absorbing layer having an annular portion and laterally spaced tapers adjacent to the waveguide core, which reduces back reflection and enhances optical coupling, comprising a semiconductor material with a light-absorbing material like germanium that generates charge carriers.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If a conventional photodetector structure is used, then the device can detect optical signals, but significant back reflection occurs due to refractive index mismatch between the photodetector material and waveguide material

Engineering Contradiction:
Improveback reflection lossVSAvoidresponsivity and quantum efficiency
Core Design Contradiction:
Loss of energyVSReliability

Solution Approach 1:

The patent applies the principle of converting the harmful back reflection into a beneficial effect by introducing a light-absorbing layer that absorbs the reflected light and converts it into electrical signals. This layer transforms the harmful reflected energy into useful photocurrent, thereby improving responsivity and quantum efficiency while reducing the negative impact of back reflection.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The patent introduces a light-absorbing layer as an intermediary between the waveguide and the photodetector. This intermediary layer serves as a mediator that captures the back-reflected light before it returns to the waveguide, converting optical energy into electrical energy and preventing the harmful reflection from degrading system performance.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If a conventional photodetector structure is used, then the device can function as a photodetector, but the device footprint is large which degrades the optical-to-electrical bandwidth

Engineering Contradiction:
Improveoptical-to-electrical bandwidthVSAvoiddevice footprint
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent segments the photodetector structure into distinct functional regions: a waveguide core for light transmission, a light-absorbing layer for optical-to-electrical conversion, and contact structures for electrical extraction. This segmentation allows each component to be optimized for its specific function while maintaining a compact overall footprint, thereby improving bandwidth without sacrificing functionality.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from a planar two-dimensional photodetector structure to a three-dimensional vertically stacked structure. By stacking the light-absorbing layer above the waveguide core and using vertical contacts, the design achieves high optical-to-electrical bandwidth in a reduced lateral footprint, effectively utilizing the vertical dimension to overcome the area-bandwidth tradeoff.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution improves device efficiency and optical-to-electrical bandwidth by suppressing back reflection and reducing the device footprint, leading to enhanced performance of the photodetector with efficient optical coupling.

Implementation Method 1

a light-absorbing layer on the pad adjacent to the waveguide core. The light-absorbing layer includes an annular portion, a first taper, and a second taper laterally spaced from the first taper

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS11609377B2Photodetectors and terminators having a curved shape
Publication Date: 2023.03.21 GLOBALFOUNDRIES US INC
  • US11609377B2 patent drawing
  • US11609377B2 patent drawing
  • US11609377B2 patent drawing

AI summary

Structures for a photodetector or terminator and methods of fabricating a structure for a photodetector or terminator. The structure includes a waveguide core having a longitudinal axis, a pad connected to the waveguide core, and a light-absorbing layer on the pad adjacent to the waveguide core. The light-absorbing layer includes an annular portion, a first taper, and a second taper laterally spaced from the first taper. The first taper and the second taper are positioned adjacent to the waveguide core.