Curved Support Arm for Stable Transfer of Deformed Substrates

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Solution Overview

Problem

Deformed substrates are unstable and prone to dropping during transfer in semiconductor manufacturing processes due to random deformation occurring during film formation, which existing rotation arms cannot effectively stabilize.

Innovation Solution

A rotation arm with a support that includes an inclination and a curved portion is used to stabilize the substrate by regulating the direction of contact and preventing movement towards the curved portion, ensuring stable transfer even with deformed substrates.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional rotation arm is used to transfer the substrate, then the transfer operation can be performed, but the deformed substrate becomes unstable and may be dropped during transfer

Engineering Contradiction:

Improvesubstrate transfer stabilityVSAvoidsubstrate handling difficulty

Core Design Contradiction:

ReliabilityVSEase of operation

Solution Approach 1:

The support surface is designed with a curved configuration that matches the natural curvature of the substrate. This curved support surface contacts the lower surface of the substrate along an arc, providing stable support even when the substrate is deformed, preventing the substrate from dropping during transfer operations

Inventive Principle:

Principle #14Spheroidality (Curvature)

Solution Approach 2:

The support structure extends beyond a simple point or line contact by providing a surface with curvature in multiple dimensions. This dimensional approach allows the support to accommodate substrate deformation in various directions while maintaining stable contact and transfer capability

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Reliability

If the support contacts the substrate to stabilize it, then substrate dropping is prevented, but the substrate may rattle during transfer

Engineering Contradiction:

Improvesubstrate transfer stabilityVSAvoidsubstrate rattling

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The curved support surface is designed to match the substrate curvature, creating a snug fit that prevents rattling. The arc-shaped contact area distributes the substrate weight evenly and eliminates gaps that would cause vibration or rattling during transfer operations

Inventive Principle:

Principle #14Spheroidality (Curvature)

3Ease of operation

If the arm structure is simplified for easy operation, then ease of operation improves, but the ability to stabilize deformed substrates deteriorates

Engineering Contradiction:

Improvearm operation simplicityVSAvoiddeformed substrate support capability

Core Design Contradiction:

Ease of operationVSReliability

Solution Approach 1:

The curved support surface provides inherent stabilization capability without requiring complex active control mechanisms. The geometric design of the curved surface automatically adapts to substrate deformation, maintaining stable support while keeping the arm structure relatively simple and easy to operate

Inventive Principle:

Principle #14Spheroidality (Curvature)

Data Source

PatentUS11891697B2Substrate processing apparatus

Publication Date: 2024.02.06 KOKUSAI DENKI KK

AI summary

There is provided a technique that includes: a process chamber in which a substrate is processed; a gas supplier configured to supply a gas into the process chamber; at least one substrate mounting table disposed in the process chamber and including a substrate mounting surface on which the substrate is mounted; and an arm configured to transfer the substrate to the substrate mounting surface while supporting a lower surface of the substrate, wherein the arm includes a support that includes an inclination and is configured to support the substrate.