Curved WLCSP Interface Reduces Crack Formation

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Solution Overview

Problem

Wafer level chip scale packaging (WLCSP) technologies face challenges with cracks forming between layers of package structures, which can lead to moisture and impurity ingress, affecting the reliability and performance of semiconductor chips.

Innovation Solution

A WLCSP structure with a curved interface surface between the molding compound and protective tape, formed through a specific manufacturing method involving dummy wafers and differential cutting tools, enhances adhesion and reduces crack formation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a flat interface surface is used between molding compound and protective tape, then the manufacturing process is simple, but cracks are frequently generated between layers

Engineering Contradiction:
Improvecrack resistanceVSAvoidinterface structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The interface surface between the molding compound and protective tape is designed with a curved profile instead of a flat surface. This curvature distributes stress more evenly across the interface, preventing crack initiation and propagation that commonly occur at sharp corners or flat interfaces under thermal and mechanical stress.

Inventive Principle:
Principle #14Spheroidality (Curvature)

2Ease of manufacture

If cracks are present between layers, then manufacturing is easier, but moisture and impurities can erode components inside

Engineering Contradiction:
Improvepackaging process simplicityVSAvoidmoisture and impurity ingress
Core Design Contradiction:
Ease of manufactureVSObject-affected harmful factors

Solution Approach 1:

The curved interface surface eliminates sharp angles and flat boundaries that serve as stress concentration points and crack initiation sites. By creating a continuous curved transition, the design prevents crack formation that would otherwise allow moisture and impurities to penetrate into the package structure.

Inventive Principle:
Principle #14Spheroidality (Curvature)

3Strength

If a curved interface surface is created, then adhesion between layers is improved, but the manufacturing process becomes more complex

Engineering Contradiction:
Improveinterlayer adhesionVSAvoidmanufacturing process complexity
Core Design Contradiction:
StrengthVSDevice complexity

Solution Approach 1:

The curved interface surface increases the surface area and improves stress distribution, enhancing adhesion between the molding compound and protective tape. The curvature creates a more gradual transition zone that allows for better material bonding while reducing stress concentration points.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Solution Approach 2:

The manufacturing process controls the curvature radius and profile of the interface surface as key parameters. By optimizing these geometric parameters, the design achieves improved adhesion strength while managing the complexity of the manufacturing process through precise but achievable geometric specifications.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS11062969B2Wafer level chip scale package structure and manufacturing method thereof
Publication Date: 2021.07.13 ALPHA & OMEGA SEMICONDUCTOR (CAYMAN) LTD
  • US11062969B2 patent drawing
  • US11062969B2 patent drawing
  • US11062969B2 patent drawing

AI summary

A wafer level chip scale package (WLCSP) structure and a manufacturing method are disclosed. The WLCSP structure comprises a semiconductor die and a stack. The stack comprises a protective tape and a molding compound. A portion of a first interface surface between the molding compound and the protective tape is curved. The manufacturing method comprises the steps of forming a semiconductor structure; attaching the semiconductor structure on a dummy wafer; performing a first dicing process using a first cutting tool; depositing a molding compound; removing the dummy wafer; performing a second dicing process with a second cutting tool. A first aperture of the first cutting tool is larger than a second aperture of the second cutting tool. The portion of the first interface surface being curved reduces the possibility of generation of cracks in the WLCSP structure.