Curved Yoke Magnetic Sensor for High Flux Density
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Solution Overview
Problem
Magnetic sensors with yokes extending in the lateral direction require a large area, while those with yokes orthogonal to the magnetic field sensing direction face challenges in achieving high magnetic flux density and accurate formation due to limitations in the plating process for deep holes.
Innovation Solution
A magnetic sensor design featuring a yoke with a first portion away from the magnetic field detection element in the lateral direction and a second portion with a curved surface protruding away, formed above a hole in the resist using plating, allowing for increased height and accurate formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If a yoke extends in the lateral direction (first direction) to guide magnetic flux, then the magnetic flux density is improved, but the area required for arranging the yoke increases
Solution Approach 1:
The patent transitions the yoke orientation from lateral extension (first direction) to vertical extension (second direction orthogonal to the first direction). This dimensional change allows the yoke to achieve sufficient magnetic flux density through increased height rather than lateral spread, thereby reducing the area required for arranging the yoke while maintaining effective magnetic flux guidance
2Quantity of substance
If the height of the yoke is increased to achieve large magnetic flux density in the vertical direction, then the magnetic flux density is improved, but the manufacturing accuracy deteriorates due to deep hole plating requirements
Solution Approach 1:
The patent applies curvature to the side surface of the yoke, forming an arch-shaped or curved structure rather than a straight vertical column. This curved geometry reduces the maximum depth of the resist hole required for plating while maintaining sufficient yoke height for magnetic flux density, thereby improving manufacturing accuracy by avoiding extremely deep hole plating operations
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design achieves high magnetic flux density and accurate formation of the yoke, enhancing the sensor's ability to detect magnetic fields efficiently while minimizing the area required.
Implementation Method 1
a yoke that guides magnetic flux in the magnetic field sensing direction of the magnetic field detection element
Implementation Method 2
forming a yoke in and above the hole of the resist by means of plating
Data Source
AI summary
A magnetic sensor having a yoke that can achieve large magnetic flux density and that can be accurately formed is provided. The magnetic sensor includes magnetic field detection element 21 that detects a magnetic field in first direction X and first yoke 23 that is located near magnetic field detection element 21 and extends in second direction Z that is orthogonal to first direction X. First yoke 23 includes first portion 23a that is located away from magnetic field detection element 21 at least in first direction X and second portion 23b that is located farther away from magnetic field detection element 21 than first portion 23a with respect to second direction Z. The second portion 23b has surface 23f that is opposite to interface 23d with the first portion 23a, surface 23f having a curved shape that protrudes in a direction away from the first portion 23a.