Cushion Member for Screen Mask Protection in Electroplating
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Solution Overview
Problem
Conventional metal film forming methods using electroplating with screen masks can cause damage to the mask due to pressure from the electrolyte membrane, especially at the substrate's outer edge portions and gaps between the substrate and mount base.
Innovation Solution
Incorporating a cushion member along the outer edge of the substrate to absorb pressure from the electrolyte membrane, preventing direct contact and damage to the screen mask, and optionally attaching it to the substrate or screen mask to ensure proper alignment and coverage of gaps.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the substrate is pressed by the electrolyte membrane with fluid pressure to ensure adhesion between the substrate and screen mask, then the adhesion is improved, but the screen mask may be damaged at the outer edge portion of the substrate
Solution Approach 1:
A cushion member is introduced as an intermediary element between the screen mask and the outer edge portion of the substrate. This cushion member absorbs the pressing force from the electrolyte membrane, preventing direct transmission of harmful stress to the screen mask while maintaining sufficient adhesion for metal ion penetration.
Solution Approach 2:
The cushion member is positioned in advance at the outer edge portion of the substrate before the pressing operation begins. This pre-positioning ensures that the screen mask is protected from damage before the harmful pressing force is applied, allowing the adhesion function to proceed without compromising the mask integrity.
2Strength
If the screen mask is pressed directly against the substrate without cushioning, then the adhesion is ensured, but the screen mask enters the gap between substrate and mount base causing damage
Solution Approach 1:
The cushion member serves as a mediator that fills the gap between the substrate and mount base. It prevents the screen mask from entering this gap by providing a physical barrier, while still allowing the necessary pressing force to be transmitted to the substrate surface for proper adhesion.
Solution Approach 2:
By positioning the cushion member beforehand at the outer edge portion of the substrate, the system prevents the screen mask from accidentally entering the gap during the pressing operation. This proactive measure eliminates the risk of mask damage while maintaining effective adhesion.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The cushion member effectively reduces stress on the screen mask, preventing damage and ensuring accurate alignment, thus maintaining the integrity of the screen mask during metal film formation.
Implementation Method 1
pressing the substrate by an electrolyte membrane with a fluid pressure of a plating solution contacting the electrolyte membrane via the screen mask
Implementation Method 2
applying a voltage between an anode contacting the plating solution and the substrate so as to allow metal ions contained in the plating solution to pass through the electrolyte membrane and form a metal film derived from the metal ions
Implementation Method 3
metal ions contained in the plating solution to pass through the electrolyte membrane and form a metal film derived from the metal ions
Data Source
AI summary
The method includes: placing a substrate on a mount base; covering the substrate with the screen mask including a penetrating portion of a predetermined pattern; pressing the substrate by the electrolyte membrane with a fluid pressure of a plating solution contacting the electrolyte membrane via the screen mask; and applying a voltage between an anode contacting the plating solution and the substrate so as to allow metal ions contained in the plating solution to pass through the electrolyte membrane and form a metal film derived from the metal ions in the predetermined pattern on the substrate. The substrate includes an outer edge portion formed by an opposite surface facing the screen mask and a side surface. A cushion member is disposed along the outer edge portion before pressing the substrate.