Cutting Blade Dressing Using Two-Step Groove Tracing

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Solution Overview

Problem

Existing dressing methods for cutting blades, such as those used for semiconductor wafers, face issues with increased wear leading to rounded tip surfaces, requiring multiple dressing boards and increased costs due to specialized software and mechanisms needed to reduce roundness.

Innovation Solution

A two-step dressing method involving a first cutting step to form a cut groove in a dressing board and a second cutting step to trace the groove bottom, allowing for multiple cuts on the same region without surpassing the roundness depth, reducing the need for additional dressing boards and avoiding specialized software/mechanisms.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the cutting blade repeatedly cuts shallowly into the dressing board to suppress region of roundness, then the region of roundness is reduced, but the area of cutting enlarges and more dressing boards are needed

Engineering Contradiction:
Improveregion of roundnessVSAvoidnumber of dressing boards
Core Design Contradiction:
Manufacturing precisionVSQuantity of substance

Solution Approach 1:

The dressing process is divided into multiple cutting steps with different cutting depths. The first cutting step uses a larger cutting depth to remove material efficiently, while the second cutting step uses a smaller cutting depth to precisely reduce the region of roundness. This segmentation allows different phases of the dressing process to use optimal cutting parameters for each objective.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The first cutting step performs excessive cutting by removing more material than strictly necessary, creating a groove that extends beyond the final desired shape. The second cutting step then performs partial action by selectively removing only the excess material and reducing the region of roundness. This approach prevents the need to repeatedly cut the entire surface area.

Inventive Principle:
Principle #16Partial or excessive action

2Manufacturing precision

If special dressing methods are used to reduce region of roundness, then the cutting blade shape is improved, but specialized software and mechanisms are required increasing cost

Engineering Contradiction:
Improvecutting blade shapeVSAvoidspecialized software and mechanism
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The dressing method uses the existing cutting blade dressing functionality of the cutting apparatus to perform multiple functions: both initial shaping and region of roundness reduction. The same chuck table movement mechanism and cutting system used for general dressing are utilized for the multi-step process, eliminating the need for specialized software or mechanisms.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The invention achieves different dressing outcomes by changing cutting parameters (cutting depth, number of passes) rather than introducing specialized mechanisms. The first cutting step uses a larger cutting depth for initial shaping, while the second cutting step uses a smaller cutting depth for precision work. This parameter-based approach maintains simplicity while achieving precise control over the cutting blade shape.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method effectively reduces the roundness at the cutting blade tip while minimizing the number of dressing boards needed and simplifying the dressing process, maintaining precise cutting capabilities without requiring complex software or mechanisms.

Implementation Method 1

a first cutting step of causing the cutting blade to cut into the dressing board held by a holding surface of a chuck table with a cutting depth that does not surpass the length of the region of roundness in the radial direction of the cutting blade

Methodology Applied
Scientific EffectAbrasion: Abrasion

Data Source

PatentUS10898983B2Dressing method of cutting blade
Publication Date: 2021.01.26 DISCO CORP
  • US10898983B2 patent drawing
  • US10898983B2 patent drawing
  • US10898983B2 patent drawing

AI summary

A dressing method of a cutting blade includes a first cutting step of causing the cutting blade to cut into a dressing board held by a holding surface of a chuck table with a cutting depth that does not surpass the length of the region of roundness in the radial direction of the cutting blade to form a cut groove in the dressing board, and a second cutting step of causing the cutting blade to further cut into the groove bottom of the cut groove formed in the first cutting step with a cutting depth that does not surpass the length of the region of roundness in the radial direction of the cutting blade to carry out cutting on the groove bottom with tracing of the cut groove.