Cutting Nozzle Layout for Swarf Control and Electrode Rust Prevention
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Cutting apparatuses fail to prevent swarf deposition and electrode oxidation during the cutting of wafers and packaged substrates, leading to reduced device quality.
Innovation Solution
A cutting apparatus with a rotatable cutting blade, an X-axis feed mechanism, a Y-axis feed mechanism, a cutting liquid supply nozzle for pure water or a mixture of organic acid and oxidizing agent, and a rust inhibitor supply nozzle to prevent electrode oxidation and rusting.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a cutting blade is used to divide the wafer into device chips, then manufacturing efficiency is improved, but swarf is generated and deposited on the wafer face side
Solution Approach 1:
The patent converts the harmful swarf byproducts of cutting into a manageable situation by introducing cutting liquid that suppresses swarf deposition. The cutting liquid transforms the harmful floating swarf into a controlled environment where swarf is suppressed and does not deposit on the wafer, allowing continuous efficient cutting operations
Solution Approach 2:
The patent uses hydraulic principles by supplying cutting liquid through nozzles to the cutting zone. The cutting liquid flow suppresses swarf generation and deposition through fluid dynamics, allowing the cutting blade to efficiently divide wafers without swarf contamination affecting device quality
2Reliability
If the rust inhibitor supply nozzle has a length in excess of the workpiece width, then complete electrode coverage is achieved, but device complexity increases
Solution Approach 1:
The rust inhibitor supply nozzle is designed with multi-functionality: it supplies rust inhibitor liquid, provides structural support for positioning, and defines the supply pattern through its geometry. This universal design allows a single component to achieve complete electrode coverage without requiring multiple separate structures, maintaining simplicity while ensuring reliability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents electrode oxidation and rusting, thereby maintaining device quality by effectively preventing swarf deposition and burr formation during the cutting process.
Implementation Method 1
a cutting liquid supply nozzle disposed adjacent to the cutting unit, for supplying a cutting liquid to a point of contact between the cutting blade and the workpiece
Implementation Method 2
a rust inhibitor supply nozzle for supplying a rust inhibitor to the workpiece on the chuck table to prevent the electrodes of the devices from being rusted
Data Source
AI summary
A cutting apparatus includes a cutting liquid supply nozzle disposed adjacent to a cutting unit, for supplying a cutting liquid to a point of contact between a cutting blade and a workpiece, and a rust inhibitor supply nozzle for supplying a rust inhibitor to the workpiece to prevent electrodes of devices divided from the workpiece from being rusted, the rust inhibitor supply nozzle having a length along a Y-axis in excess of the width of the workpiece along the Y-axis.