Cutting Apparatus Suction Fixation for Semiconductor Wafer Blades
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Solution Overview
Problem
Conventional cutting apparatuses for semiconductor wafers require frequent blade replacements, which involve cumbersome operations of tightening and loosening the fixing flange, reducing production efficiency and making blade replacement difficult due to the spiral screw thread design.
Innovation Solution
A cutting apparatus with a mounter and fixing flange system where a suction mechanism is used to easily attach and detach the cutting blade, allowing for efficient replacement without special tools or skills, using a rotary joint and suction means to apply reduced pressure and fix the blade securely.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the fixing flange with spiral screw threads is used to prevent loosening during cutting operation, then the reliability of blade fixation is improved, but the ease of operation for blade replacement deteriorates
Solution Approach 1:
The patent replaces the traditional mechanical screw thread system with a magnetic field-based fixation system. The fixing flange contains a magnet that magnetically attracts the cutting blade holder, eliminating the need for spiral screw threads. This substitution maintains reliable fixation during cutting operations while allowing easy blade replacement by simply overcoming the magnetic attraction, without requiring complex loosening operations.
Solution Approach 2:
The patent introduces a suction hole in the fixing flange that can be connected to a vacuum source. By applying negative pressure through the suction hole, the cutting blade holder is suctioned onto the fixing flange, providing secure fixation during cutting operations. For blade replacement, the vacuum is released, allowing easy removal without complex loosening operations.
2Reliability
If the fixing flange tightening force is gradually increased with cutting operation progress, then the reliability of fixation is improved, but the difficulty of loosening the fixing flange increases
Solution Approach 1:
The patent replaces the mechanical screw thread system with a magnetic field-based fixation system. The fixing flange contains a magnet that magnetically attracts the cutting blade holder, eliminating the need for spiral screw threads. This substitution maintains reliable fixation during cutting operations while allowing easy blade replacement by simply overcoming the magnetic attraction, without requiring complex loosening operations.
Solution Approach 2:
The patent incorporates a suction hole in the fixing flange that can be connected to a vacuum source before cutting operations begin. By applying negative pressure in advance, the cutting blade holder is securely suctioned onto the fixing flange. This preliminary action ensures reliable fixation without requiring gradual tightening during operation, and the vacuum can be quickly released for easy blade replacement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates easy and efficient replacement of cutting blades, improving production efficiency by simplifying the process and ensuring secure fixation without the need for complex tooling or expertise.
Implementation Method 1
When the suction means is operated, a reduced pressure is applied through the rotary joint, the communication passage, and the suction hole to the space between the mounter and the fixing flange, so that the fixing flange is sucked toward the mounter to thereby fix the cutting blade between the mounter and the fixing flange.
Data Source
AI summary
A cutting unit includes a spindle housing, a spindle, a mounter fixed to the front end portion of the spindle for supporting a cutting blade, and a fixing flange for fixing the cutting blade to the mounter. The mounter includes a boss portion for axially slidably supporting the fixing flange, the boss portion being fitted to an engaging hole formed in a central portion of the fixing flange, a flange portion projecting radially outward from the outer circumference of the boss portion, the flange portion having a supporting surface for supporting the cutting blade on the front side opposed to the fixing flange, and a cylindrical portion formed on the rear side of the flange portion. The flange portion has a suction hole opening. The cylindrical portion has a communication passage communicating with the suction hole. The communication passage is connected through a rotary joint to a suction unit.