Multi-Zone Lamp Module for CVD Substrate Temperature Uniformity
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Solution Overview
Problem
Current semiconductor manufacturing processes using chemical vapor deposition (CVD) tools with two heating zones lack sufficient control over substrate temperature uniformity, necessitating a more refined temperature control mechanism.
Innovation Solution
The implementation of a lamp module with three or more heating zones, including a back plate with extending rings and multiple lamps configured to emit infrared radiation, providing focused heating on distinct regions of the substrate, such as an edge, middle, and center region, along with optional backside heating zones to enhance thermal uniformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a two-zone reflector is used to heat the substrate, then some temperature control is achieved, but the temperature uniformity across the substrate is insufficient
Solution Approach 1:
The heating system is segmented into three distinct heating zones with separate lamp arrays: a first heating zone for the outer region, a second heating zone for the middle region, and a third heating zone for the central region. Each zone can be independently controlled to achieve precise temperature uniformity across the entire substrate surface.
Solution Approach 2:
Different regions of the substrate receive tailored heating characteristics through localized lamp arrangements. The outer region receives heating from the first lamp array, the middle region from the second lamp array, and the central region from the third lamp array, allowing each zone to be optimized for its specific thermal requirements.
2Manufacturing precision
If more heating zones are added to improve temperature control, then temperature uniformity improves, but device complexity increases
Solution Approach 1:
The substrate heating area is divided into three concentric regions (outer, middle, central), each served by a dedicated lamp array. This segmentation enables independent temperature control for each region, achieving high process uniformity without requiring excessive heating zones.
Solution Approach 2:
The heating system utilizes a three-dimensional lamp module structure with lamps positioned at different heights and radial distances from the substrate. This spatial arrangement allows three heating zones to be achieved with a compact configuration, managing device complexity through efficient use of three-dimensional space.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly improves temperature uniformity across the substrate, allowing for finer control and more precise processing conditions, especially when combined with rotatable substrates and overlapping irradiation patterns from front and backside lamps.
Implementation Method 1
a third plurality of lamps configured to emit infrared radiation that propagates into the third ring
Implementation Method 2
The lamps irradiate the substrate through an enclosure. That is, the heaters are outside of the chamber. In order to allow the thermal energy to pass through the enclosure, the enclosure is a material that is transparent to infrared radiation.
Implementation Method 3
In existing CVD tools, reflectors are used to focus the infrared radiation towards the surface of the substrate
Implementation Method 4
reflectors are used to focus the infrared radiation towards the surface of the substrate
Data Source
AI summary
Embodiments disclosed herein include a lamp module for a semiconductor processing chamber. In an embodiment, the lamp module plate comprises a back plate, a first ring that extends from the back plate, a second ring that extends from the back plate, and a third ring that extends from the back plate. In an embodiment, the lamp module further comprises a first plurality of lamps between the first ring and the second ring, a second plurality of lamps between the second ring and the third ring, and a third plurality of lamps configured to emit infrared radiation that propagates into the third ring.