CVD Particle Filter with Mechanical Vibration Cleaning
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Solution Overview
Problem
In CVD devices, fine particles in the exhaust gas stream agglomerate on the surface of particle filters, leading to compromised filtering performance due to surface coverage, which reduces the effectiveness of particle filtration.
Innovation Solution
A mechanical cleaning mechanism is introduced to loosen conglomerates from the filter medium, utilizing a mass acceleration device such as a hammer or vibration system to dislodge particles, and a filter medium with specific pore size and surface quality to prevent particle penetration, allowing conglomerates to form and be removed outside the filter.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a particle filter is used to remove particles from the exhaust gas stream, then particle filtration is achieved, but the filter medium surface becomes covered with agglomerated particles, compromising filtering performance
Solution Approach 1:
The patent employs a vibration device that generates mechanical vibrations to loosen and remove particle agglomerates from the filter medium surface. The vibration frequency and amplitude are controlled to effectively dislodge particles without damaging the filter structure, thereby restoring the available filtering surface area and maintaining reliable particle filtration performance.
Solution Approach 2:
The patent implements periodic cleaning cycles where the vibration device is activated at intervals to remove accumulated particle agglomerates from the filter medium. This periodic action prevents complete surface coverage, maintains continuous filtering effectiveness, and optimizes the balance between particle capture and surface area availability.
2Manufacturing precision
If the filter medium has small pore size to prevent particle penetration, then filtration efficiency is improved, but particle agglomerates form more readily on the surface
Solution Approach 1:
The vibration device generates mechanical vibrations that prevent particle agglomerates from firmly adhering to the filter medium surface. By applying vibrational energy, loose agglomerates are continuously disrupted and removed, allowing the filter to maintain high filtration efficiency with small pore sizes without suffering from severe agglomeration problems.
Solution Approach 2:
The patent replaces passive filtration with active mechanical vibration to manage particle agglomeration. Instead of relying solely on the filter medium's physical properties, a mechanical vibration system is introduced to dynamically counteract the agglomeration tendency, enabling the use of fine-pore filters without the usual drawbacks.
3Reliability
If a vibration device is added to clean the particle filter, then filtering performance is maintained, but device complexity increases
Solution Approach 1:
The vibration device is designed to serve multiple functions: it cleans the filter medium surface, prevents particle agglomeration, and can be integrated with existing filter housing structures. This multi-functionality reduces the need for separate cleaning systems and minimizes overall device complexity while maintaining reliable filtering performance.
Solution Approach 2:
The vibration device is configured to automatically clean the filter medium during or between filtration operations without requiring manual intervention. The system self-regulates the cleaning process, reducing operational complexity and maintaining consistent filtering performance through automated maintenance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively enhances the filtering performance by removing conglomerates, maintaining the filter's surface area for efficient gas passage and preventing particle penetration, thus improving the overall efficiency of the particle filter.
Implementation Method 1
the pore size and the surface quality of filter medium (16) is selected in such a manner that the particles located in the exhaust gas stream adhere to the surface of filter medium (16)
Implementation Method 2
a vibration device (7), which brings the particle filter (4) in vibration
Implementation Method 3
a mass acceleration device (7), by which at least one of the filter cartridges (4) is able to be set in motion
Data Source
AI summary
The invention relates to a device for coating substrates in a process chamber (8) of a reactor housing (1), having a gas inlet member (11) for introducing process gases into the process chamber (8), having a gas outlet member (10) for discharging an exhaust gas stream from the process chamber (8) into a particle filter (4), which is disposed in a particle separator housing (3) and has a porous filter medium (16) for out-filtering particles from the exhaust gas stream, which form during a reaction of the process gases. In order to improve the filtering performance of a particle filter at a CVD or PVD device and to specify a suitable particle filter for this intended purpose, the invention suggests that the pore size and the surface quality of the filter medium (16) are selected in such a manner that the particles located in the exhaust gas stream adhere to the surface of the filter medium (16), however do not penetrate the filter medium (16), and the particles grow to conglomerates outside of the filter medium (16), and a mass acceleration device is provided for cleaning the particle filter (4) by mechanically removing the conglomerates.