CVD Precursor Container with Vacuum Insulation for Stable Vaporization

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Solution Overview

Problem

Existing CVD precursor containers face challenges in maintaining precursor purity during storage, transportation, and vaporization, with issues such as contamination, corrosion, and unstable temperature control, particularly when using organometallic compounds.

Innovation Solution

A CVD precursor supply container with a double-wall structure, vacuum heat insulation, and a metal interior coated with diamond-like carbon (DLC) layers to maintain temperature stability and prevent contamination, combined with a reusable design for efficient cleaning and refilling.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a fluororesin coating is applied to the container interior surface to prevent contamination, then precursor purity is improved, but stable vaporization and supply of precursor cannot be ensured

Engineering Contradiction:

Improveprecursor purityVSAvoidstable vaporization

Core Design Contradiction:

Manufacturing precisionVSReliability

Solution Approach 1:

The container employs a composite structure combining metal material (for thermal conductivity and structural strength) with a fluororesin coating layer (for contamination prevention). This composite approach allows simultaneous achievement of stable vaporization through metal thermal properties and precursor purity through the fluororesin coating's chemical inertness and non-stick characteristics.

Inventive Principle:

Principle #40Composite materials

2Temperature

If the container is heated from the outside to vaporize the precursor, then vaporization is achieved, but temperature control becomes troublesome due to heat loss

Engineering Contradiction:

Improvevaporization temperatureVSAvoidtemperature control

Core Design Contradiction:

TemperatureVSEase of operation

Solution Approach 1:

The container is equipped with a lid that creates a sealed environment, and inert gas may be introduced to prevent oxidation and contamination. This inert atmosphere maintains stable thermal conditions during heating and vaporization processes, reducing unwanted heat loss and improving temperature control.

Inventive Principle:

Principle #39Inert atmosphere (Inert environment)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Ensures stable vaporization and supply of high-purity precursors to CVD apparatuses, allowing for the production of high-quality semiconductor products by minimizing contamination and corrosion, and enabling repeated use of the container.

Implementation Method 1

a vacuum heat insulating layer provided between the inner tube and the outer tube

Methodology Applied

Scientific EffectVacuum heat insulation: Thermal Insulation

Implementation Method 2

the metal container has a bottom to be heated by a heat source

Methodology Applied

Scientific EffectHeating: Heating

Implementation Method 3

A precursor contained in such a bubbling container is heated to be vaporized by blowing inert gas into the container

Methodology Applied

Scientific EffectVaporization: Evaporation

Data Source

PatentUS20250223689A1CVD precursor supply container, method of reuse thereof, and precursor deposition method

Publication Date: 2025.07.10 MITSUBISHI CHEM CORP

AI summary

A CVD container having excellent temperature controllability which ensures that a CVD precursor can be stably vaporized and supplied to a CVD apparatus is described. The CVD precursor supply container is adapted to vaporize a CVD precursor and supply the vaporized CVD precursor, and includes a metal container having a side portion of a double-wall structure including an inner tube and an outer tube each made of a metal, and a vacuum heat insulating layer provided between the inner tube and the outer tube.