CVD Reactor Vibration for Particle Adherence Reduction
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Solution Overview
Problem
In chemical vapor deposition systems, such as atomic layer deposition (ALD), particle or microparticle agglomeration and adherence to surfaces are significant issues, leading to uneven coatings, product loss, and reduced coating quality.
Innovation Solution
The implementation of agitating devices, including sonicators, impactors, and vibration devices, in communication with the reactor vessel to prevent or reduce particle agglomeration and adherence to surfaces within the reactor system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If chemical vapor deposition is performed in a reactor system, then coating layers are formed on particles, but particle agglomeration and adherence to reactor walls occur leading to uneven coatings and product loss
Solution Approach 1:
The reactor system incorporates a vibration device that applies mechanical vibrations to the particle bed during chemical vapor deposition. This vibration prevents particles from adhering to reactor walls and reduces particle agglomeration by maintaining particle mobility and preventing contact points from forming stable bonds, thereby ensuring uniform coating distribution.
Solution Approach 2:
The patent replaces traditional mechanical stirring or fluidization systems with a vibration-based approach. The vibration device generates oscillatory motion that effectively keeps particles suspended and prevents adherence without requiring complex mechanical stirring mechanisms or high-velocity gas flows, simplifying the system while achieving the desired particle distribution.
2Productivity
If coating process continues without interruption, then production efficiency increases, but wall deposits increase in thickness requiring manual intervention
Solution Approach 1:
The vibration device operates continuously throughout the coating process, enabling uninterrupted deposition. By preventing particle adherence to reactor walls in real-time, the system maintains continuous productive operation without requiring periodic stoppages for manual removal of wall deposits, thus maximizing coating production efficiency.
Solution Approach 2:
The vibration device applies preventive action by continuously agitating the particle bed before particles can accumulate and form thick wall deposits. This preliminary continuous agitation prevents the formation of problematic deposits that would otherwise require manual intervention, allowing the coating process to proceed without interruption.
3Device complexity
If particles are allowed to settle on contact points, then coating process simplifies, but contact points provide weak and uneven sections of coating
Solution Approach 1:
The vibration device prevents particles from settling into stable contact points by maintaining continuous oscillatory motion. This ensures that all particle surfaces remain exposed to the vapor phase and receive uniform coating, eliminating weak sections that would form at contact points while maintaining process simplicity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach maintains uniform particle distribution, reduces agglomeration and adherence, and enhances the quality and uniformity of coatings, thereby increasing production efficiency and reliability.
Implementation Method 1
the agitator can be a sonicator configured to deliver mechanical energy in the form of waves such as sound waves or vibrations
Implementation Method 2
the agitator is an impactor... configured or programmed to prevent or reduce adherence of microparticles or coated microparticles to a surface of the reactor vessel
Implementation Method 3
the agitator is a vibration device... configured or programmed to prevent or reduce adherence of microparticles or coated microparticles to a surface of the reactor vessel
Data Source
AI summary
Embodiments disclosed herein relate to a modified reactor system for creating coated particles of thermostable agents having reduced loss and improved coating uniformity due to avoidance of adherence of the particles to the reactor or to other particles. In certain embodiments, a reactor system includes a reactor vessel configured to receive particles of thermostable agents, and one or more agitating appendages or devices, including at least one of ultrasonic agitator, mechanical impactor, and low-frequency vibrator either directly connected or in fluid communication with the reactor system for sonicating, impacting, or vibrating a reactor vessel during the particle coating process. In some embodiments, the reactor system includes a gas phase dosing system configured to introduce alternating pulses of chemically gas phase materials into the reactor vessel to form a coating on the particles while continuously or intermittently agitating the reactor system.