Cyclic Exposure Scanning System With Distributed Multi-Lens
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Solution Overview
Problem
In optical lithography, traditional cyclic exposure methods result in low light source utilization efficiency due to periodic flashing, leading to waste of energy and reduced exposure speed.
Innovation Solution
A cyclic exposure scanning system with a distributed multi-lens configuration uses a light guide structure and computational processing to redirect optical images to multiple optical imaging devices within a single cycle time, allowing simultaneous exposure of multiple substrates and optimizing light source utilization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the light source is periodically flashed to prevent elongation of projected light spots, then exposure resolution and exposure speed are improved, but light source utilization efficiency deteriorates
Solution Approach 1:
The patent divides the light source output into multiple independent optical imaging devices (first optical imaging device, second optical imaging device, etc.), each capable of receiving and projecting optical images to different exposure areas. This segmentation allows the light source to serve multiple functions simultaneously, improving utilization efficiency while maintaining resolution through controlled optical path distribution.
Solution Approach 2:
The patent introduces a temporal dimension by utilizing the dark period of the flashing cycle to redirect light to other optical imaging devices. Instead of wasting the dark period, the system uses it to prepare and redirect optical images to different exposure areas, effectively adding a time-based dimension to the exposure process that improves overall efficiency without compromising resolution.
2Manufacturing precision
If the light source is turned off during the cycle time, then elongation of projected light spots is prevented, but light source utilization efficiency deteriorates
Solution Approach 1:
The patent ensures continuous useful action by redirecting the light source to different optical imaging devices during the cycle time. Even when the light source is turned off for one exposure area, it is redirected to another optical imaging device that can still perform exposure, eliminating energy waste and maintaining continuous productive operation throughout the cycle.
Solution Approach 2:
The patent introduces a light guide structure as an intermediary component that redirects optical images from the light source to different optical imaging devices. This intermediary mechanism enables the light source to serve multiple exposure areas sequentially, preventing energy waste during the cycle time while maintaining exposure quality through controlled optical path management.
3Productivity
If multiple substrates are exposed simultaneously, then exposure efficiency is improved, but device complexity increases
Solution Approach 1:
The patent implements multi-functionality by configuring multiple optical imaging devices that can each receive and project optical images to different exposure areas on substrates. The light guide structure serves multiple functions by redirecting light to different devices, enabling a single light source to handle multiple substrates simultaneously, thereby improving productivity without proportionally increasing complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances exposure efficiency and light source utilization, reducing equipment costs while maintaining exposure resolution and speed by utilizing the 'dark period' of the flashing cycle.
Implementation Method 1
a light guide structure configured to guide the first optical image to the first optical imaging device and guide the second optical image to the second optical imaging device according to the control command
Implementation Method 2
an optical engine configured to project a corresponding first optical image and a corresponding second optical image according to the control command
Implementation Method 3
a first optical imaging device configured to project the first optical image onto a first exposure area of the substrate; a second optical imaging device configured to project the second optical image onto a second exposure area of the substrate
Data Source
AI summary
The present invention provides a cyclic exposure scanning system having distributed multi-lens and method thereof. The system includes a processor, a platform, an optical engine, a first optical imaging device, a second optical device and a light guide structure. By executing the method of the present disclosure by the system, the optical engine projects the first optical image and the second optical image respectively. The first optical image is guided to the first optical imaging device and the second optical image is sequentially guided to the second optical imaging device through the light guide structure. The first optical imaging device and the second optical imaging device receives and projects the first and second optical images onto the corresponding exposure areas, respectively. Such that efficiency and light source utilization may be significantly increased.