Cyclohexasilane Distillation Purity and Stability

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Solution Overview

Problem

The challenge lies in efficiently purifying cyclohexasilane to high purity for applications in semiconductors and solar cells, as existing methods face low purification efficiency and stability issues due to spontaneous combustion, reactivity with air and water, and the need for specialized storage and apparatus cleaning to prevent impurity formation.

Innovation Solution

The method involves distilling cyclohexasilane under specific pressure and temperature conditions, using airtight containers with inert gases, and a multi-step cleansing process to achieve high purity and stability, while also treating exhaust gases to remove hazardous silane compounds.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If cyclohexasilane is distilled at a low temperature, then the condensation is certain, but the evaporation rate is low and solidified matter adheres to the condenser causing obstruction

Engineering Contradiction:
Improvecondensation certaintyVSAvoidevaporation rate
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent applies parameter changes by controlling the distillation temperature within a specific range (25-100°C) and adjusting the heating rate based on the boiling point of cyclohexasilane. The process dynamically adjusts temperature parameters to maintain optimal evaporation rate while preventing condenser obstruction, resolving the contradiction between reliable condensation and productive evaporation.

Inventive Principle:
Principle #35Parameter changes

2Productivity

If cyclohexasilane is distilled at a high temperature, then the evaporation rate increases, but distillation stops in the midst reducing purification efficiency

Engineering Contradiction:
Improveevaporation rateVSAvoiddistillation continuity
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent implements dynamics by continuously adjusting the heating temperature during the distillation process based on the boiling point of cyclohexasilane and the state of the system. The heating rate is dynamically controlled to prevent overheating and ensure continuous distillation, resolving the contradiction between high evaporation rate and distillation continuity.

Inventive Principle:
Principle #15Dynamics

3Quantity of substance

If cyclohexasilane is stored in a container, then mass production and storage are enabled, but spontaneous combustion and oxidation occur when contact with air

Engineering Contradiction:
Improvestorage capacityVSAvoidstorage stability
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent applies inert atmosphere by storing cyclohexasilane in a container filled with inert gas (nitrogen or argon) to prevent contact with air. This eliminates oxygen and moisture that would cause spontaneous combustion and oxidation, resolving the contradiction between storage capacity and storage stability.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

4Manufacturing precision

If conventional purification methods are used for cyclohexasilane, then purification is attempted, but purification efficiency remains very low

Engineering Contradiction:
ImprovepurityVSAvoidpurification efficiency
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent applies parameter changes by optimizing the distillation temperature range (25-100°C) and controlling the heating rate to match the boiling point of cyclohexasilane. These parameter adjustments significantly improve purification efficiency while achieving high purity (98% or more), resolving the contradiction between manufacturing precision and productivity.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in cyclohexasilane with a purity of 98% or more, improved storage stability, and efficient apparatus cleaning, ensuring high purity and safety in handling and storage, while safely exhausting gases from silicon hydride compound handling facilities.

Implementation Method 1

when cyclohexasilane is purified by distillation

Methodology Applied
Scientific EffectDistillation: Distillation

Implementation Method 2

the evaporation rate is low

Methodology Applied
Scientific EffectEvaporation: Evaporation

Implementation Method 3

the temperature of a condenser is necessary to be low in order to certainly condense vaporized cyclohexasilane

Methodology Applied
Scientific EffectCondensation: Condensation

Implementation Method 4

cyclohexasilane has spontaneous combustion characteristics that reacts with oxygen in the air when comes into contact with air and spontaneously ignites, and is oxidized to produce a siloxane compound as an impurity

Methodology Applied
Scientific EffectOxidation: Oxidation

Implementation Method 5

a method for storing a silicon hydride compound

Methodology Applied
Scientific EffectInert atmosphere:

Implementation Method 6

cyclohexasilane is ring-opening polymerized by light and heat

Methodology Applied
Scientific EffectPhotopolymerisation: Photopolymerisation

Implementation Method 7

cyclohexasilane is ring-opening polymerized by light and heat

Methodology Applied
Scientific EffectHeat: Heating

Data Source

PatentUS9764961B2Cyclohexasilane
Publication Date: 2017.09.19 NIPPON SHOKUBAI CO LTD
  • US9764961B2 patent drawing
  • US9764961B2 patent drawing
  • US9764961B2 patent drawing

AI summary

High purity cyclohexasilane and a method for increasing the purification efficiency thereto are provided. The method for producing cyclohexasilane of the present invention is characterized in that, in distilling crude cyclohexasilane to obtain purified cyclohexasilane, the absolute pressure during distillation is set to 2 kPa or less, and the heating temperature of crude cyclohexasilane is set to 25 to 100° C. The cyclohexasilane of the present invention contains pure cyclohexasilane at a rate of 98% by mass or more and 100% by mass or less.