Cylinder-Shaped Capacitor Electrodes With Lattice Support
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Solution Overview
Problem
High aspect-ratio container-shaped storage nodes in capacitors are structurally weak and prone to toppling, twisting, or breaking due to their tall and thin dimensions, which limits their scalability in high-density DRAM devices.
Innovation Solution
A semiconductor structure featuring cylinder-shaped electrodes with an upper support structure comprising a first lattice structure and a lower support structure that interlocks the middle portions of the electrodes, preventing toppling, along with an annular spacer around the tip portion, all made from materials like silicon nitride and silicon oxide, ensuring stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If high aspect-ratio container-shaped storage nodes are used to reduce footprint, then capacitor density is improved, but structural strength deteriorates causing toppling and breaking
Solution Approach 1:
The support structure is divided into multiple discrete lattice elements arranged in a lattice pattern. These segmented lattice pieces work together to provide distributed support to the high aspect-ratio storage nodes, preventing toppling while maintaining the compact footprint.
Solution Approach 2:
The lattice support structure provides localized support at specific positions beneath the storage nodes. By concentrating support at critical points where toppling would occur, the structure achieves effective stabilization without requiring uniform reinforcement throughout the entire capacitor area.
2Device complexity
If single lattice layer is used to retain uppermost position, then device complexity is reduced, but reliability deteriorates due to insufficient support
Solution Approach 1:
The solution transitions from a single-layer (2D) lattice structure to a multi-layer (3D) lattice structure. By stacking multiple lattice layers at different vertical positions, the structure provides support at multiple heights, significantly improving reliability while maintaining relatively simple individual layer designs.
Data Source
AI summary
A semiconductor structure includes a substrate having thereon at least one conductive region; a plurality of cylinder-shaped electrodes disposed on the substrate, wherein each of the cylinder-shaped electrodes has a horizontal portion that is in direct contact with the at least one conductive region and a vertical sidewall portion connecting the horizontal portion; an upper support structure comprising a first lattice structure that is situated in a first horizontal level that is lower than a tip portion of each of the cylinder-shaped electrodes; and a lower support structure comprising a second lattice structure that interlocks middle portions of the cylinder-shaped electrodes.