Cylindrical Master for Continuous Laser Lithography

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Solution Overview

Problem

Existing imprinting techniques fail to maintain continuity of the exposure pattern on cylindrical masters due to control methods that result in blank regions or errors in the arrangement of concavities or convexities, making it difficult to form continuous exposure patterns.

Innovation Solution

A master with a hollow or cylindrical substrate having a concave-convex structure with continuously arranged concavities or convexities at a predetermined pitch, manufactured using a method where the exposure signal and rotation control signal share a reference clock, ensuring precise control and synchronization to avoid blank or error regions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the start position of the exposure pattern is controlled for each rotation of the roll-shaped member based on a start pulse generated at regular timing, then the arrangement of the exposure pattern can be controlled for each rotation, but the continuity of the exposure pattern is lost and blank regions appear

Engineering Contradiction:

Improvearrangement precision of exposure patternVSAvoidcontinuity of exposure pattern

Core Design Contradiction:

Manufacturing precisionVSReliability

Solution Approach 1:

The patent applies the principle of continuity by generating the start pulse continuously throughout the exposure process rather than resetting it for each rotation. This continuous start pulse signal maintains the phase relationship between consecutive rotations, ensuring that the exposure pattern continues without interruption or blank regions while still achieving precise arrangement control through the rotating member's motion.

Inventive Principle:

Principle #20Continuity of useful action

2Productivity

If a continuous exposure pattern is formed without interruption, then the productivity is improved, but the precision of controlling the arrangement of concavities or convexities becomes difficult

Engineering Contradiction:

Improveproduction efficiency of masterVSAvoidarrangement precision of concave-convex structure

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

The patent employs feedback by using a sensor to detect the position of the rotating member and feeding this position information back to the control unit. The control unit uses this feedback to adjust the exposure timing and duration dynamically, ensuring that the continuous exposure process maintains precise control over the arrangement of concavities and convexities throughout the entire rotation cycle.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The patent replaces traditional mechanical positioning methods with a combination of continuous rotational motion and electronically controlled exposure timing. Instead of mechanically stopping and repositioning the rotating member for each pattern cycle, the system uses continuous rotation synchronized with electronically generated exposure signals, achieving both high productivity and precision.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Adaptability or versatility

If the exposure pattern is formed by controlling start position for each rotation, then the arrangement can be adjusted, but error regions appear where concavities or convexities are formed in incorrect arrangement

Engineering Contradiction:

Improveadjustability of exposure pattern arrangementVSAvoiduniformity of exposure pattern

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The patent applies dynamics by making the exposure parameters (timing, duration) variable and continuously adjustable based on the real-time position of the rotating member. Rather than using fixed, discrete positioning for each rotation, the system dynamically adjusts exposure parameters throughout continuous rotation, eliminating error regions while maintaining adaptability through programmable control.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables the precise control of concave-convex structures on the master's surface, allowing for continuous and error-free transfer of patterns, enhancing the optical characteristics and mass production efficiency of transfer copies.

Implementation Method 1

the master is manufactured by continuously forming a pattern on the outer peripheral surface of a cylindrical substrate by irradiation of the substrate with a laser beam

Methodology Applied

Scientific EffectLaser lithography: Laser

Data Source

PatentUS12083713B2Master, transfer copy, and method for manufacturing master

Publication Date: 2024.09.10 DEXERIALS CORP

AI summary

There are provided a master and a method for manufacturing the master, the master having, on its outer peripheral surface, a concave-convex structure in which concavities or convexities are continuously arranged with high precision. The master includes: a substrate with a hollow cylindrical shape or cylindrical shape; and a concave-convex structure on an outer peripheral surface of the substrate. The concave-convex structure has concavities or convexities continuously arranged at a predetermined pitch in a circumferential direction of the substrate. The concavities or convexities are arranged with a predetermined phase difference between circumferential rows adjacent in an axial direction of the substrate.