Cylindrical Shutter Assembly for Sputtering Throughput
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Solution Overview
Problem
Existing deposition systems face inefficiencies due to the need for blanking plates that occupy valuable space on the carousel, reducing parts throughput and wasting material during the pre-burn process in sputter deposition.
Innovation Solution
A shutter assembly is introduced that can be rotated independently of the carousel to block deposition sources during pre-burn and then move out of the way for coating, eliminating the need for blanking plates and allowing full carousel capacity for parts.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If blanking plates are used to block deposition sources during pre-burn, then contaminants are blocked from parts, but valuable carousel space is occupied and parts throughput is reduced
Solution Approach 1:
The system separates the blanking function from the carousel structure by introducing an independent shutter assembly that can be rotated independently. This segmentation allows the blanking plates to be positioned only when needed during pre-burn, while the carousel maintains full capacity for parts during deposition operations.
Solution Approach 2:
The shutter assembly is made dynamically controllable through an independent rotation mechanism, allowing it to move between blocking and non-blocking positions. This dynamic capability enables the system to optimize for either contaminant protection or parts throughput depending on the operational phase, without permanently sacrificing carousel capacity.
2Loss of substance
If blanking plates are installed on the carousel to block sources during pre-burn, then material waste is prevented, but the carousel capacity for parts is reduced
Solution Approach 1:
The blanking function is extracted from the carousel structure and placed in a separate shutter assembly. This extraction allows the carousel to be dedicated entirely to holding parts, while the shutter assembly provides the material protection function independently, thereby eliminating the trade-off between material waste prevention and parts capacity.
3Productivity
If a separate shutter assembly with independent drive train is added, then parts throughput increases by 40%, but device complexity increases
Solution Approach 1:
The shutter assembly serves multiple functions: it acts as a blanking plate during pre-burn, can be rotated out of the way during deposition, and can be positioned to protect specific areas. This multi-functionality justifies the added complexity by eliminating the need for permanent carousel modifications while providing flexible control over material deposition.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution increases parts throughput by up to 40% and prevents material waste by ensuring that contaminants are directed away from the parts during deposition, improving sputter target material utilization.
Implementation Method 1
one or more deposition sources arranged to flow deposition material onto the cylindrical parts carousel
Implementation Method 2
a cylindrical shutter assembly having a shuttered position in which the cylindrical shutter assembly blocks the one or more deposition sources from depositing onto the parts carousel
Data Source
AI summary
A deposition system comprises a vacuum chamber having a cylindrical inner wall, a cylindrical parts carousel disposed concentrically inside the cylindrical inner wall of the vacuum chamber, and one or more deposition sources arranged to flow deposition material onto the cylindrical parts carousel. A cylindrical shutter assembly is disposed concentrically inside the cylindrical inner wall of the vacuum chamber, and has (1) a shuttered position in which the cylindrical shutter assembly blocks the one or more deposition sources from depositing onto the parts carousel and (2) an unshuttered position in which the cylindrical shutter assembly does not block the one or more deposition sources from depositing onto the parts carousel. A drive train rotates the cylindrical shutter assembly between the shuttered and unshuttered positions. The drive train not operatively connected to rotate the cylindrical parts carousel. The deposition sources may include inner and outer sputter sources.