Cylindrical Target Straightness Control for Sputtering

The patent applies preliminary action by measuring the straightness of the cylindrical target in the longitudinal direction before installation in the sputtering apparatus. The measurement is performed using a laser displacement sensor that detects the position of the target along its length, and any deviations exceeding a predetermined threshold are corrected before the target is put into service. This prevents distortion-related malfunctions and abnormal discharge during operation.

The patent performs straightness measurement and correction before the target is installed and rotated in the sputtering apparatus. A laser displacement sensor measures the target's position along its longitudinal axis, identifying any deviations from straightness. Corrections are made to ensure the target maintains proper geometry during rotation, which ensures uniform distance from the substrate and produces evenly thick films.

The patent replaces complex mechanical correction methods with a measurement-based approach. A laser displacement sensor non-contactly measures the target's straightness by detecting light reflection from the target surface. The sensor system includes a laser source, beam splitter, and position-sensitive detector that converts optical measurements into straightness data without requiring physical contact or complex mechanical adjustment mechanisms.