Gallium-Doped CZ Silicon Substrates for Oxygen Defect Suppression

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Solution Overview

Problem

Thermal treatment of silicon single crystal substrates at 800° C. or higher leads to oxygen-induced defects, reducing minority carrier lifetime and degrading solar cell performance, particularly in substrates with higher oxygen concentrations.

Innovation Solution

Subjecting silicon single crystal ingots or substrates to high temperature thermal treatment at 1200° C. or more for 30 seconds or more before low temperature thermal treatment at 800° C. or more and less than 1200° C. to dissolve oxide precipitate nuclei, preventing defect growth.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If thermal treatment is performed at 800°C or more to form emitter layer or oxide film, then the solar cell manufacturing process can be completed, but oxygen-induced defects grow and minority carrier lifetime decreases

Engineering Contradiction:
Improveease of manufactureVSAvoidminority carrier lifetime
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent applies preliminary action by performing high-temperature thermal treatment (1200°C or more for 30 seconds or more) before the low-temperature thermal treatment (800°C to 1200°C) to dissolve oxide precipitate nuclei in advance. This preliminary dissolution prevents oxygen-induced defects from growing during subsequent manufacturing processes, thereby maintaining minority carrier lifetime while still enabling complete solar cell manufacturing.

Inventive Principle:
Principle #10Preliminary action

2Quantity of substance

If high oxygen concentration is present in the substrate, then material availability is improved, but defect growth is accelerated and solar cell characteristics degrade

Engineering Contradiction:
Improveoxygen concentrationVSAvoidsolar cell characteristics
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent converts the harmful effect of high oxygen concentration into a beneficial outcome by using the oxygen itself to form oxide precipitates that can be dissolved through high-temperature treatment. The high-temperature thermal treatment (1200°C or more) dissolves the oxide precipitate nuclei, transforming the potential harm of oxygen-induced defects into an opportunity to create a cleaner substrate with improved solar cell characteristics.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Prevents decrease in minority carrier lifetime, thereby improving the conversion efficiency of solar cells manufactured using these substrates.

Implementation Method 1

subjecting the silicon single crystal ingot or the silicon substrate to high temperature thermal treatment at a temperature of 1200° C. or more for 30 seconds or more before the low temperature thermal treatment

Methodology Applied
Scientific EffectThermal treatment: Heat Treatment

Implementation Method 2

it is possible to previously dissolve oxide precipitate nuclei, which can be origins of oxide precipitation defects

Methodology Applied
Scientific EffectDissolution: Solvation

Data Source

PatentUS12414401B2Method for manufacturing substrate for solar cell and substrate for solar cell
Publication Date: 2025.09.09 SHIN ETSU CHEMICAL CO LTD
  • US12414401B2 patent drawing
  • US12414401B2 patent drawing
  • US12414401B2 patent drawing

AI summary

A solar cell includes a light-receiving surface electrode formed on a light-receiving surface, a back surface electrode formed on a backside, and a CZ silicon single crystal substrate doped with gallium. The CZ silicon single crystal substrate contains 12 ppm or more oxygen atoms. A spiral oxygen-induced defect is not observed in an EL (electroluminescence) image of the solar cell.