DBC Clip With Partially Etched Channels For Semiconductor Thermal Dissipation

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Solution Overview

Problem

Current semiconductor packages face challenges in efficiently dissipating heat from semiconductor die, which can lead to thermal performance issues and reduced reliability.

Innovation Solution

The implementation of direct bond copper (DBC) clips with partially etched channels in a copper layer directly bonded to ceramic layers, allowing for dual-sided cooling and improved thermal dissipation by aligning channels with the width and location of spaces between semiconductor die.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If traditional cooling methods are used for semiconductor die, then the package structure remains simple, but thermal performance is insufficient leading to heat dissipation issues

Engineering Contradiction:
Improvethermal performanceVSAvoidpackage structure
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The copper layer is segmented by etching channels through it, creating multiple heat dissipation pathways. This segmentation allows heat to be conducted away through distributed channels rather than relying on a simple bulk copper structure, significantly improving thermal performance while maintaining a relatively compact package structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The copper layer with etched channels creates a porous-like structure that enhances heat dissipation. The channels act as pathways for heat conduction and can also accommodate thermal interface materials, improving the overall thermal management capability of the package without requiring a completely redesigned structure.

Inventive Principle:
Principle #31Porous materials

2Loss of energy

If clips are made without etched channels, then manufacturing is simpler, but heat dissipation from semiconductor die is insufficient

Engineering Contradiction:
Improveheat dissipationVSAvoidclip fabrication
Core Design Contradiction:
Loss of energyVSEase of manufacture

Solution Approach 1:

The copper layer is divided into multiple sections by etching channels through it. This segmentation creates efficient heat dissipation pathways that conduct heat away from the semiconductor die effectively. The channel geometry can be optimized to balance thermal performance with manufacturing complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The etching process changes the physical parameters of the copper layer by creating channels with specific dimensions, depths, and patterns. These parameter changes enable enhanced heat dissipation while the etching process itself is a standard manufacturing technique that can be integrated into existing fabrication workflows.

Inventive Principle:
Principle #35Parameter changes

3Loss of energy

If channels are fully etched through the copper layer, then heat dissipation is maximized, but structural integrity and electrical connectivity may be compromised

Engineering Contradiction:
Improvethermal dissipation efficiencyVSAvoidstructural integrity
Core Design Contradiction:
Loss of energyVSStrength

Solution Approach 1:

Instead of fully etching channels through the entire copper layer thickness, the channels are etched to a partial depth that provides sufficient heat dissipation pathways while leaving the copper layer intact at the bottom. This partial etching approach maintains structural integrity and electrical connectivity while achieving the necessary thermal management performance.

Inventive Principle:
Principle #16Partial or excessive action

Solution Approach 2:

The etched channels are strategically positioned in specific locations where heat dissipation is most needed, rather than uniformly distributing them throughout the entire copper layer. This localized approach optimizes thermal performance in critical areas while preserving the overall structural strength and electrical functionality of the clip.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances thermal performance by up to 30% and increases the reliability and yield of semiconductor packages during manufacturing.

Implementation Method 1

a first copper layer directly bonded to a first side of a ceramic layer, a second copper layer directly bonded to a second side of the ceramic layer

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

a plurality of channels partially etched into a thickness of the second copper layer. The plurality of channels may be configured to dissipate heat from a plurality of semiconductor die

Methodology Applied
Scientific EffectHeat dissipation: Conduction (thermal)

Implementation Method 3

The clip may be a direct bond copper (DBC) clip

Methodology Applied
Scientific EffectThermal energy transfer: Conduction (thermal)

Data Source

PatentUS20220173022A1Clips for semiconductor package and related methods
Publication Date: 2022.06.02 SEMICON COMPONENTS IND LLC
  • US20220173022A1 patent drawing
  • US20220173022A1 patent drawing
  • US20220173022A1 patent drawing

AI summary

Implementations of a clip may include a first copper layer directly bonded to a first side of a ceramic layer, a second copper layer directly bonded to a second side of the ceramic layer, the second side of the ceramic layer opposite the first side of the ceramic layer, and a plurality of channels partially etched into a thickness of the second copper layer.