DBD Plasma Polarization Apparatus for Piezoelectric Films
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Solution Overview
Problem
Conventional corona discharge techniques for polarizing piezoelectric materials suffer from nonuniform discharge, leading to polarization blind zones and reduced efficiency, requiring additional mechanisms for uniformity and increased processing time.
Innovation Solution
A polarization apparatus utilizing a dielectric barrier discharge (DBD) plasma source generates two-dimensional uniform plasma, eliminating the need for moving or rotating mechanisms and enabling batch or continuous processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If corona discharge technique is used for polarization, then high electric field can be generated to align molecular structures, but nonuniform discharge occurs leading to polarization blind zones and reduced polarization uniformity
Solution Approach 1:
The patent transitions from conventional single-point or multi-point corona discharge to a two-dimensional planar electrode configuration. The electrode assembly includes a conductive plate with multiple discharge points distributed across its surface, creating a two-dimensional discharge region that uniformly covers the piezoelectric film, thereby eliminating polarization blind zones and achieving uniform polarization across the entire film area.
Solution Approach 2:
The electrode is divided into multiple segmented discharge points or regions distributed across the conductive plate surface. Each segment independently generates corona discharge, and the collective effect of all segments provides uniform coverage. This segmentation allows the system to maintain high electric field strength while achieving spatial uniformity across the entire film area.
2Manufacturing precision
If transmission mechanism is used to move and rotate electrode or work piece for uniform exposure, then polarization uniformity can be enhanced, but processing time is prolonged and apparatus complexity increases
Solution Approach 1:
Instead of using mechanical movement in one dimension (translating or rotating the film), the patent employs a two-dimensional stationary electrode array that provides uniform discharge across the entire film surface simultaneously. This eliminates the need for time-consuming mechanical transmission mechanisms while achieving the same polarization uniformity.
Solution Approach 2:
The patent replaces the mechanical transmission system (motors, gears, conveyors) with an electrical field-based solution. The two-dimensional electrode configuration creates a static but uniformly distributed electric field that achieves polarization without any mechanical movement, thereby eliminating moving parts and reducing apparatus complexity.
3Manufacturing precision
If transmission mechanism is used to achieve full exposure, then polarization uniformity is improved, but apparatus space and cost increase
Solution Approach 1:
The patent uses a two-dimensional planar electrode configuration that provides uniform discharge coverage across the entire film area in a single stationary position. This eliminates the need for large mechanical transmission mechanisms and associated space requirements, achieving compact apparatus design while maintaining polarization uniformity.
4Reliability
If electric field is limited to prevent electric arcs, then work piece damage is avoided, but polarization effect and polarization rate are limited
Solution Approach 1:
The patent distributes the electric field generation across a two-dimensional array of discharge points on the conductive plate. This spatial distribution allows the system to maintain lower electric field intensity at each individual discharge point (preventing arcs and damage) while achieving high overall polarization rate through the cumulative effect of all discharge points acting simultaneously across the entire film area.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The DBD plasma source enhances polarization uniformity, increases polarization rate, reduces apparatus cost and space requirements, and allows for wide applicability in various processing methods.
Implementation Method 1
a dielectric barrier discharge (DBD) plasma source is disposed over the carrying surface and is configured to apply plasma toward the piezoelectric material film
Implementation Method 2
The corona discharge is easily generated, and can provide a high electric field environment required by a polarization process
Implementation Method 3
Molecular structures in the piezoelectric material have an asymmetric property, such that positively charged substances and negative charged substances are distributed nonuniformly
Data Source
AI summary
A polarization apparatus includes a conductive carrier, a dielectric barrier discharge (DBD) plasma source, an electric net, a DBD power supply, and a DC power supply. The conductive carrier has a carrying surface which is configured to carry a work piece. The work piece includes a piezoelectric material film, and the conductive carrier is grounded. The DBD plasma source is disposed over the carrying surface and is configured to apply plasma toward the piezoelectric material film. The electric net is disposed between the carrying surface and the DBD plasma source. The DBD power supply includes a first electrode and a second electrode, in which the first electrode is electrically connected to the DBD plasma source, and the second electrode is grounded. The DC power supply includes a third electrode and a fourth electrode. The third electrode is electrically connected to the electric net, and the fourth electrode is grounded.