DC High-Voltage Source Circuit for Ripple Cancellation Control

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Solution Overview

Problem

Existing DC high-voltage source devices in charged particle beam devices suffer from ripple generation due to electrostatic and electromagnetic induction noise, which affects the resolution and performance of the devices, and existing ripple reduction methods are difficult to implement in insulating environments and prone to residual ripple and noise superimposition.

Innovation Solution

A DC high-voltage source device utilizing a first and second variable DC voltage source, switching circuits, transformers, and a computer system to independently control voltage and phase of AC voltages, enabling precise cancellation of ripple and reducing noise superimposition.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If a Cockcroft-Walton circuit with movable adjustment mechanism is used to reduce ripple, then ripple cancellation capability is improved, but device complexity and difficulty of operation increase significantly

Engineering Contradiction:
ImproverippleVSAvoiddevice complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent replaces the mechanical movable adjustment mechanism with an electronic control system. Instead of physically adjusting capacitor positions or wiring configurations, the invention uses a computer system to independently control the voltage and phase of multiple AC voltage sources, achieving ripple cancellation through electronic parameter adjustment rather than mechanical reconfiguration.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent divides the single Cockcroft-Walton circuit into multiple parallel circuits, each with its own AC voltage source. By segmenting the system into multiple independent voltage sources (first AC voltage source, second AC voltage source, etc.), each can be independently controlled to contribute to ripple cancellation, simplifying the overall control strategy compared to adjusting a single complex circuit.

Inventive Principle:
Principle #1Segmentation

2Measurement precision

If multiple variable DC voltage sources with independent control are used, then ripple cancellation precision is improved, but device complexity increases

Engineering Contradiction:
Improveripple cancellation precisionVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent implements a feedback control system where a computer monitors the ripple in the DC high voltage output and automatically adjusts the voltage and phase parameters of the multiple AC voltage sources to minimize ripple. This closed-loop feedback mechanism achieves high precision ripple cancellation while automating the control process, reducing the need for complex manual adjustments.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent achieves precise ripple cancellation by independently varying key parameters (voltage magnitude and phase angle) of multiple AC voltage sources. By changing these parameters under computer control, the system can optimize ripple cancellation for different operating conditions without requiring physical reconfiguration of the circuit architecture.

Inventive Principle:
Principle #35Parameter changes

3Object-affected harmful factors

If distance adjustment mechanism is added to Schenkel-type circuit, then ripple reduction capability is improved, but ease of operation deteriorates due to external adjustment requirements

Engineering Contradiction:
ImproverippleVSAvoidease of operation
Core Design Contradiction:
Object-affected harmful factorsVSEase of operation

Solution Approach 1:

The patent makes the system self-adjusting by implementing automatic computer control that monitors and corrects ripple conditions without external intervention. The system serves itself by automatically detecting ripple and adjusting voltage parameters to minimize it, eliminating the need for external operators to perform manual distance adjustments or other operational interventions.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent replaces manual mechanical adjustment operations with automated electronic control. Instead of requiring operators to physically adjust distances or configurations, the system uses computer-controlled electronic parameter adjustment, significantly improving ease of operation while maintaining effective ripple reduction.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces ripple and noise in the DC high-voltage source, improving device performance and enabling smaller, higher accuracy devices with reduced risk of failure.

Implementation Method 1

a first switching circuit for generating an AC voltage from a DC voltage of the first variable DC voltage source, a second switching circuit for generating an AC voltage from a DC voltage of the second variable DC voltage source

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

a first transformer for transforming the AC voltage generated by the first switching circuit, a second transformer for transforming the AC voltage generated by the second switching circuit

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 3

The DC high voltage applied between the charged particle source and the acceleration electrode corresponds to the beam energy of the charged particle beam

Methodology Applied
Scientific EffectElectrostatic induction: Electrostatic Induction

Data Source

PatentUS12525883B2DC high-voltage source device including plurality of variable DC voltage sources and plurality of switching circuits, and charged particle beam device including the DC high-voltage source device
Publication Date: 2026.01.13 HITACHI HIGH TECH CORP
  • US12525883B2 patent drawing
  • US12525883B2 patent drawing
  • US12525883B2 patent drawing

AI summary

A DC high-voltage source device includes a first voltage source including first and second variable DC voltage sources; first and second switching circuits that generate an AC voltage from the DC voltage of the first and second variable DC voltage sources, respectively; a first transformer that transforms the AC voltage generated by the first switching circuit; a second transformer that transforms the AC voltage generated by the second switching circuit; a DC high-voltage generation circuit that generates a DC high voltage based on a transformed AC voltage supplied from the first transformer and a transformed AC voltage supplied from the second transformer. A computer system independently adjusts the DC voltage value of the first variable DC voltage source, the DC voltage value of the second variable DC voltage source, the switching timing of the first switching circuit, and the switching timing of the second switching circuit.