DC Pulse Power Supply Reset for Reactor Magnetic Saturation
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Solution Overview
Problem
The existing DC pulse power supply devices face challenges in resetting magnetic saturation of DC reactors without stopping power supply, leading to inefficiencies in plasma processing due to repeated reboot requirements and reduced operating rates.
Innovation Solution
The DC pulse power supply device incorporates a control circuit unit with a suspension/restart control unit that suspends the switching element's ON/OFF operation for a predetermined time to reset magnetic saturation, maintaining power supply to the load and using a voltage clamping unit to equalize voltage-time products, thereby preventing magnetic saturation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the switching element's ON/OFF operation is suspended to reset magnetic saturation, then magnetic saturation is reset, but power supply to the load is interrupted
Solution Approach 1:
The control circuit detects magnetic saturation conditions in advance and suspends the switching element's ON/OFF operation proactively to reset magnetic saturation before it causes harmful effects. This preliminary action prevents the harmful effect of magnetic saturation while the control circuit manages the suspension timing to minimize impact on power supply continuity.
Solution Approach 2:
The control circuit continuously monitors the magnetic saturation state of the DC reactor and provides feedback control. When saturation is detected, the control circuit adjusts the switching element's operation to reset saturation, and when reset is achieved, normal operation resumes. This closed-loop feedback ensures magnetic saturation is reset while maintaining power supply continuity through intelligent control timing.
2Reliability
If the DC pulse power supply device stops power supply to reset magnetic saturation, then magnetic saturation is reset, but operating rate and efficiency are reduced
Solution Approach 1:
The control circuit detects magnetic saturation conditions in advance and initiates suspension of the switching element's ON/OFF operation before the harmful effects of saturation occur. This preliminary detection and suspension approach allows for faster reset timing compared to stopping power supply after saturation occurs, thereby reducing the loss of time and improving operating rate.
Solution Approach 2:
The control circuit implements continuous monitoring of magnetic saturation state with feedback control. When saturation is detected, the control circuit immediately suspends switching operation and monitors for reset completion. Once reset is confirmed through feedback, normal operation resumes automatically. This rapid feedback-based control minimizes the time loss associated with magnetic saturation reset events.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively resets magnetic saturation while maintaining power supply to the load, reducing reboot times and improving plasma processing efficiency by avoiding interruptions in power delivery.
Implementation Method 1
A voltage clamping unit 130 clamp is provided to clamp a voltage across a DC reactor 121B to a predetermined voltage. A voltage clamping unit 130clampB has a capacitor C connected in parallel to the DC reactor 121B. The voltage clamping unit 130clampB clamps a voltage VC in the capacitor C to a voltage lower than the surge voltage
Implementation Method 2
In general, permeability of a reactor decreases as a magnetic field increases due to an increase in a current, and when a magnetic flux density of a magnetic material reaches its peak, the reactor reaches a magnetic saturation state
Implementation Method 3
The pulse generation circuit repeatedly performs an ON/OFF operation of the switching element to interrupt a DC voltage, thereby obtaining a DC voltage with a pulse waveform
Data Source
AI summary
In the present invention, when a DC reactor is in a magnetically saturated state, the on/off operations of a switching element are suspended and the switching element is set to an off state for a predetermined period of time, thereby resetting the magnetic saturation of the DC reactor and maintaining the supply of power to a load. After resetting the magnetic saturation, the pulse output of the normal pulse mode is restarted.