DC Voltage Estimation in Substrate Processing Systems
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Solution Overview
Problem
Existing substrate processing systems face challenges in preventing the application of DC voltage outside the allowable range to specific parts, which can lead to abnormal discharge, process stop, or equipment damage due to the lack of effective control mechanisms.
Innovation Solution
A substrate processing system that includes a controller and an analysis server to acquire process conditions, measure real-time DC voltage, and create a regression analysis equation to estimate the DC voltage, predicting potential voltage exceedances and triggering warnings or recipe adjustments to prevent voltage beyond the power rating from being applied.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If DC voltage is applied to a specific part in the processing container, then the substrate processing function is improved, but the risk of voltage exceeding allowable range and causing equipment damage increases
Solution Approach 1:
The system performs preliminary estimation of DC voltage using a regression analysis equation before actual substrate processing. By calculating the estimated DC voltage based on process conditions in advance, the system can predict whether voltage will exceed the allowable range and prevent harmful effects before they occur.
Solution Approach 2:
The system measures the actual DC voltage during substrate processing and feeds this information back to update the regression analysis equation. This feedback mechanism allows the system to continuously improve its estimation accuracy and maintain reliable operation while preventing voltage exceedance.
2Reliability
If DC voltage control is implemented without estimation mechanism, then the device complexity is reduced, but the ability to prevent voltage exceedance is weakened
Solution Approach 1:
The system replaces complex physical voltage monitoring and control hardware with a software-based regression analysis equation. By using mathematical modeling to estimate DC voltage based on process conditions, the system achieves reliable voltage control safety without adding significant physical complexity to the control system.
Solution Approach 2:
The regression analysis equation acts as an intermediary between process conditions and DC voltage control. Instead of directly monitoring voltage with complex hardware, the system uses the equation as a mediator to predict voltage based on measurable process parameters, simplifying the overall control architecture.
Data Source
AI summary
There is provided a substrate processing system. The system comprises: a substrate processing device having a processing container configured to perform processing of a substrate, and a direct current (DC) power source configured to apply a DC voltage to a specific part in the processing container; and a controller configured to control the substrate processing device. A process performed by the controller includes a process of acquiring desired process conditions and a real value of the DC voltage measured during processing of the substrate based on the process conditions, and a process of creating a regression analysis equation which calculates an estimated value of the DC voltage using a plurality of conditions among the process conditions as explanatory variables based on the acquired process conditions and real value of the DC voltages.