Modular DC-DC Waveshaping for Fast High-Voltage Pulse Control
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Solution Overview
Problem
Existing technologies struggle to generate high voltage customized waveforms efficiently for applications such as semiconductor etching and plasma processing, which require precise control over ion energy distribution and fast rise/fall times.
Innovation Solution
A system comprising a plurality of DC-DC converter cells, controlled by logic circuitry, selectively engages and deactivates these cells to generate customized high-voltage waveforms with nanosecond-scale precision, using frequency and timing adjustments to achieve desired waveform shapes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If conventional power supplies are used to generate high voltage waveforms, then the system is simple to operate, but the waveform customization capability is limited and rise/fall times are slow
Solution Approach 1:
The power supply system is divided into multiple modular DC-DC converter cells that can be independently controlled. Each cell operates as a separate functional unit, allowing selective engagement and deactivation to create customized waveforms. This segmentation enables flexible waveform shaping while maintaining manageable system complexity through modularity.
Solution Approach 2:
The system dynamically adjusts the engagement state of individual converter cells based on the desired waveform characteristics. By selectively activating or deactivating cells in real-time, the system can generate customized high-voltage waveforms with specific rise/fall times and amplitude profiles, transforming a static power supply into a dynamic waveform synthesis system.
2Manufacturing precision
If multiple DC-DC converter cells are selectively engaged to generate customized waveforms, then waveform precision and rise/fall times are improved, but the device complexity increases
Solution Approach 1:
The use of multiple segmented converter cells allows precise control over waveform characteristics. Each cell contributes a portion of the total voltage and can be independently timed, enabling nanosecond-scale precision in rise and fall times. The segmentation transforms a single complex high-voltage generator into multiple simpler, precisely controllable units.
Solution Approach 2:
The logic circuitry monitors the output waveform and adjusts the engagement timing of converter cells to achieve the desired waveform precision. Feedback mechanisms ensure that the combined output of multiple cells matches the target waveform specifications, compensating for variations in individual cell performance.
3Speed
If conventional single-stage power conversion is used, then the device structure is simple, but the transient response is slow and cannot achieve nanosecond-scale precision
Solution Approach 1:
The power conversion process is segmented into multiple DC-DC converter stages, each capable of fast switching. By distributing the voltage conversion across multiple stages that can be selectively engaged, the system achieves nanosecond-scale transient response while keeping each individual converter stage relatively simple and manageable.
Solution Approach 2:
The converter cells are engaged and deactivated in periodic sequences to generate pulsed high-voltage waveforms with fast rise and fall times. This periodic switching action across multiple cells enables nanosecond-scale transient response by rapidly transitioning between different cell combinations, creating sharp waveform edges.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise control over ion energy distribution and fast transient responses, facilitating advanced semiconductor processing by generating waveforms with high voltages, rapid transitions, and customizable features like slope and pulse width.
Implementation Method 1
A system comprising a plurality of DC-DC converter cells, controlled by logic circuitry, selectively engages and deactivates these cells to generate customized high-voltage waveforms
Data Source
AI summary
System for generating customized waveforms include a plurality of DC-DC converter cells coupled in series to form a stack; and a controller to generate control signals to drive the DC-DC converter cells in the stack to generate a customized waveform at a node, the controller comprising a lookup table to store at least one characteristic affecting the customized waveform, wherein the control signals to each of the plurality of DC-DC converter cells are based at least in part on the at least one characteristic.