Decentered Stop Layout for Oblique X-Ray Imaging Optics
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Solution Overview
Problem
Existing imaging optical arrangements for X-ray imaging struggle to maintain high-quality imaging when X-rays enter the transfer field in an oblique or tilted manner, leading to larger spot sizes and reduced resolution for small object structures.
Innovation Solution
The imaging optical arrangement includes a stop positioned at a decentering distance relative to the optical axis, allowing adaptation to oblique or tilted X-ray entry, with a decentering distance adjusted to the angle of incidence, and a movable shield stop to ensure precise X-ray illumination on desired object regions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a stop is arranged at the optical axis of the imaging optics, then the imaging arrangement is simple and aligned, but the spot size increases and resolution deteriorates when X-rays enter at oblique angles
Solution Approach 1:
The stop is deliberately decentered from the optical axis by a decentering distance that is at least 10% of the stop opening width. This asymmetric positioning compensates for the oblique angle of incoming X-rays, maintaining a small mean spot size and high imaging resolution even when X-rays enter the transfer field at tilted angles.
2Illumination intensity
If the stop opening width is increased to allow more X-rays, then the imaging field is better illuminated, but the spot size increases and resolution decreases
Solution Approach 1:
The decentering distance of the stop is optimized as a parameter that is at least 10% of the stop opening width. This parameter optimization allows the stop opening to be sufficiently wide for adequate X-ray illumination while the decentering maintains a small mean spot size, thereby preserving imaging resolution.
3Measurement precision
If the decentering distance is increased to compensate for oblique angles, then spot size is reduced and resolution is maintained, but the stop positioning becomes more complex
Solution Approach 1:
The stop is pre-positioned at a decentered location during the design and assembly phase, rather than requiring dynamic adjustment during operation. This preliminary action of setting the decentering distance to at least 10% of the stop opening width eliminates the need for complex real-time positioning mechanisms while maintaining spot size control for oblique X-ray angles.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables high-resolution imaging of structures smaller than 20 μm, including Cu-Cu hybrid bonding structures and 3D tomographic reconstruction by combining 2D images, while minimizing unnecessary X-ray exposure.
Implementation Method 1
a layer of scintillator material arranged at the transfer field
Data Source
AI summary
An imaging optical arrangement serves to image an object illuminated by X-rays. An imaging optics serves to image a transfer field in a field plane into a detection field in a detection plane. A layer of scintillator material is arranged at the transfer field. A stop is arranged in a pupil plane of the imaging optics. The imaging optics has an optical axis. A center of a stop opening of the stop is arranged at a decentering distance with respect to the optical axis. Such imaging optical arrangement ensures a high quality imaging of the object irrespective of a tilt of X-rays entering the transfer field. The imaging optical arrangement is part of a detection assembly further comprising a detection array and an object mount. Such detection assembly is part of a detection system further comprising an X-ray source.