Decoupled Multi-Parameter Run-To-Run Controller Offsets
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Solution Overview
Problem
Manufacturing processes face challenges in adjusting tool settings to produce articles with parameters close to desired values, especially when multiple models are processed through multiple tools, and tool performance drift occurs.
Innovation Solution
A controller method generates offsets for tool parameter settings, incorporating tool and device offsets, and updates these values based on measured parameters to minimize errors, with distinct modes for characterized and uncharacterized tools and devices, ensuring only one offset is significantly changed at a time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If tool settings are adjusted to produce articles with parameters close to desired values for multiple models, then manufacturing precision is improved, but device complexity increases due to multiple tools and models with different desired parameter values and drift performances
Solution Approach 1:
The patent segments the tool offset into two independent components: a tool-specific offset component and a model-specific offset component. This segmentation allows each component to be adjusted independently based on measured parameter deviations, simplifying the control of complex multi-tool, multi-model manufacturing systems while maintaining high manufacturing precision.
2Manufacturing precision
If tool offsets are updated frequently to compensate for performance drift, then manufacturing precision is improved, but loss of time increases due to frequent adjustments and maintenance
Solution Approach 1:
The patent implements a feedback mechanism where measured parameter values from manufactured articles are compared against desired parameter values, and the deviations are used to update tool offsets and model offsets. This closed-loop feedback system automatically compensates for tool performance drift over time, maintaining manufacturing precision without requiring frequent manual interventions or tool maintenance.
3Adaptability or versatility
If multiple tools process multiple models with different desired parameter values, then adaptability is improved, but manufacturing precision deteriorates due to difficulty in adjusting settings for different combinations
Solution Approach 1:
The patent segments the offset compensation into tool-specific and model-specific components, where each tool has its own offset component and each model has its own offset component. This segmentation enables the system to handle any tool-model combination efficiently by simply adding the appropriate tool offset and model offset, maintaining manufacturing precision across all adaptability scenarios without complex adjustment procedures.
Data Source
AI summary
A manufacturing process including a controller method to generate a tool setting which includes a tool offset and a device offset. The controller method uses a device parameter measurement to update the tool offset and device offset. A tool weight and a device weight is assigned so that only one of the tool offset and device offset is significantly changed during the update. The process may be applied to semiconductor device manufacturing and particularly to integrated circuit fabrication.