Decoupling Capacitors in Transistor Assemblies

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Solution Overview

Problem

Conventional decoupling capacitors in integrated circuit devices are inadequate for newer transistor structures, particularly tri-gate transistors, leading to performance degradation due to insufficient charge storage and noise interference, and increasing the operating voltage to mitigate this results in unnecessary power dissipation.

Innovation Solution

The integration of high-capacity decoupling capacitors with a high stored charge density per unit area, strategically placed near transistors, utilizing a conductive sheet with channels in the base or metal layers, and employing an electron beam direct write technique to minimize plate separation and enhance capacitance, effectively blocking noise and transferring power efficiently.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If conventional decoupling capacitor structures are used, then device complexity is reduced, but capacitance per unit area is insufficient and charge storage capacity is inadequate

Engineering Contradiction:
Improvecharge storage capacityVSAvoidcapacitor area
Core Design Contradiction:
Quantity of substanceVSArea of stationary object

Solution Approach 1:

The patent transitions from planar capacitor structures to three-dimensional vertically-stacked capacitor structures. Multiple capacitor plates are stacked vertically with dielectric layers between them, enabling significantly higher capacitance per unit area by utilizing the vertical dimension rather than only horizontal expansion.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The capacitor structure embeds multiple capacitor plates and dielectric layers within each other in a nested configuration. The capacitors are integrated within the transistor structure itself, with capacitor plates formed using the same conductive layers as the transistor, achieving space-efficient nesting of functional elements.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Reliability

If conventional decoupling capacitors are used, then manufacturing process is simpler, but noise blocking capability is insufficient and performance degradation occurs

Engineering Contradiction:
Improvenoise blocking capabilityVSAvoidcapacitor structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The decoupling capacitor structure is merged with the transistor structure, sharing common conductive layers and forming integrated multi-functional blocks. The capacitor plates are formed using the same conductive layers that form the transistor electrodes, combining storage and switching functions in a unified structure.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent introduces vertical stacking of capacitor plates to create three-dimensional capacitor structures that provide superior noise blocking capability. The multiple stacked plates create enhanced electromagnetic field confinement and improved decoupling performance compared to conventional planar capacitors.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If operating voltage is increased to mitigate performance degradation, then noise blocking is improved, but power dissipation increases unnecessarily

Engineering Contradiction:
Improvedecoupling performanceVSAvoidpower dissipation
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent changes the physical parameters of the capacitor structure (vertical stacking, plate area, dielectric material properties) to achieve higher capacitance and improved decoupling performance at the original operating voltage, eliminating the need to increase voltage and thereby avoiding additional power dissipation.

Inventive Principle:
Principle #35Parameter changes

4Quantity of substance

If capacitor plates are placed closer together to enhance capacitance, then capacitance per unit area increases, but manufacturing precision requirements increase

Engineering Contradiction:
Improvecapacitance per unit areaVSAvoidplate separation control
Core Design Contradiction:
Quantity of substanceVSManufacturing precision

Solution Approach 1:

The capacitor plates are formed using the same conductive layers that define the transistor structure, utilizing the existing layer thickness and alignment from the transistor fabrication process. This merging of formation processes ensures consistent plate separation without requiring additional precision steps.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent uses dielectric layers with high permittivity values to achieve the required capacitance with larger plate separations, reducing the stringent precision requirements. The high-k dielectric materials provide sufficient capacitance even with relaxed dimensional tolerances.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution provides quicker and stronger charge redistribution to transistors, minimizing voltage droops and performance degradation without increasing operating voltage, thus improving the reliability and efficiency of integrated circuit devices.

Implementation Method 1

a capacitor in the base layer or in a metal layer... providing quicker and stronger charge redistribution to the transistors

Methodology Applied
Scientific EffectCapacitance: Capacitance

Implementation Method 2

effectively blocking noise from reaching the supply line of the transistor

Methodology Applied
Scientific EffectElectromagnetic shielding: Faraday Cage

Implementation Method 3

employing an electron beam direct write technique to minimize plate separation and enhance capacitance

Methodology Applied
Scientific EffectElectron beam deposition: Electron Beam

Data Source

PatentEP3161866B1Decoupling capacitors and arrangements
Publication Date: 2021.04.21 INTEL CORP
  • EP3161866B1 patent drawingFigure 1~2
  • EP3161866B1 patent drawingFigure 3
  • EP3161866B1 patent drawingFigure 4

AI summary

Various embodiments of transistor assemblies, integrated circuit devices, and related methods are disclosed herein. In some embodiments, a transistor assembly may include a base layer in which a transistor is disposed, a first metal layer, and a second metal layer disposed between the base layer and the first metal layer. The transistor assembly may also include a capacitor, including a sheet of conductive material with a channel therein, disposed in the base layer or the second metal layer and coupled to a supply line of the transistor. Other embodiments may be disclosed and/or claimed.