Defect Inspection with Integrated Height Measurement Classification
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Solution Overview
Problem
Existing defect inspection methods struggle to accurately distinguish defects based on their height, leading to inconsistent defect classification and unnecessary repair processes.
Innovation Solution
A defect inspection device and method that incorporates a height measurer using optical triangulation and contrast detection autofocus to measure defect heights, integrating this data with 2D image data for improved classification accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If automatic optical inspection (AOI) and automatic defect classification (ADC) are used to detect and classify defects, then defect detection capability is improved, but the ability to distinguish defects according to height is insufficient
Solution Approach 1:
The patent transitions from 2D image inspection to 3D defect characterization by integrating height measurement. The height measurer captures vertical dimension data through optical triangulation and autofocus methods, enabling defects to be classified not only by their visual appearance but also by their height, thus resolving the limitation of traditional AOI systems that cannot distinguish defects according to height.
Solution Approach 2:
The inspection device is enhanced with multi-functionality by integrating both the inspection device for 2D image capture and the height measurer for 3D measurement into a single system. This unified system can simultaneously perform visual defect detection and height measurement, eliminating the need for separate processing steps and enabling comprehensive defect classification based on both image data and height data.
2Measurement precision
If additional processing steps are added to measure defect height, then defect classification accuracy is improved, but process complexity increases
Solution Approach 1:
The patent merges the height measurement function into the existing inspection workflow. The height measurer is integrated with the inspection device such that height data can be acquired during the same inspection process, rather than requiring separate measurement steps. This integration allows defect classification to utilize both image data and height data without significantly increasing process complexity.
Solution Approach 2:
The height measurer automatically acquires height data during the inspection process without requiring additional manual intervention or complex post-processing. The system self-services by capturing height information through optical triangulation and autofocus methods as part of the normal inspection flow, thereby improving classification accuracy without proportionally increasing operational complexity.
3Reliability
If defect height measurement is integrated into the inspection process, then defect classification consistency is improved, but measurement time may increase
Solution Approach 1:
The height measurer performs height measurement during the inspection process itself, capturing height data before final defect classification is made. By acquiring height information in advance as part of the inspection workflow, the system ensures that both image data and height data are available simultaneously for consistent defect classification, avoiding the need for separate post-inspection measurement steps that would increase total measurement time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances defect classification consistency and reduces unnecessary repair processes by accurately determining defect heights without additional processing steps, thereby improving process efficiency.
Implementation Method 1
The height measurer may be configured to measure the reference height by an autofocus method using optical triangulation
Implementation Method 2
The height measurer may be configured to measure the height of the defect by a contrast detection autofocus method
Data Source
AI summary
A defect inspection device according to one or more embodiments includes an inspection device for detecting a defect by line-scanning an object, and for generating review image data for the defect, a height measurer for acquiring a reference height of the defect and a height of the defect, and for generating height data of the defect, and a defect classifier for classifying the defect based on the review image data and the height data.