Defect Inspection Device Using Pre-Stored Exposure Parameters
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing defect inspection technologies face challenges in accurately and rapidly detecting minute defects and defects represented by minute signals in received light images, and require multiple position changes for radiation irradiation, leading to time-consuming inspection processes.
Innovation Solution
A defect inspection device and method that includes an image acquisition unit, input unit, exposure condition acquisition unit, storage unit, parameter determination unit, and image processing unit, which determine image processing parameters based on exposure conditions, physical features, and exposure information to extract defect candidate images from received light images, enabling accurate and rapid detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional defect inspection methods are used to detect minute defects in received light images, then detection capability is limited, but inspection time increases and accuracy decreases
Solution Approach 1:
The system performs preliminary actions by pre-calculating and storing exposure information (shading patterns) for various inspection conditions in advance. When inspection is performed, the appropriate exposure information is retrieved and used to determine image processing parameters without requiring real-time calculations or multiple position changes, thus reducing inspection time while maintaining accuracy for detecting minute defects
Solution Approach 2:
The system changes parameters by determining image processing parameters based on the relationship between exposure conditions and shading patterns. By adjusting processing parameters according to pre-stored exposure information corresponding to different inspection conditions, the system achieves accurate defect detection without requiring multiple irradiation positions or time-consuming adjustments
2Measurement precision
If multiple position changes are made for radiation irradiation to improve detection accuracy, then detection capability improves, but inspection efficiency decreases
Solution Approach 1:
The system creates copies by pre-storing exposure information (shading patterns) for various inspection conditions in a database. Instead of physically moving the radiation source or inspection object to multiple positions, the system retrieves appropriate exposure information copies and uses them to determine image processing parameters, achieving accurate defect detection while maintaining high inspection efficiency
Solution Approach 2:
The system replaces the mechanical approach of physically changing irradiation positions with an information-based approach. By substituting physical movement with retrieval and application of pre-stored exposure information, the system eliminates time-consuming position changes while maintaining the ability to adapt to different inspection conditions for accurate defect detection
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution allows for precise and swift detection of minute defects and defect candidates in received light images by determining suitable image processing parameters, improving inspection efficiency and accuracy.
Implementation Method 1
a received light image created on the basis of transmitted light or reflected light of an inspection object obtained by irradiating the inspection object with radiation
Implementation Method 2
a received light image created on the basis of transmitted light or reflected light of an inspection object obtained by irradiating the inspection object with radiation
Implementation Method 3
an image processing unit that extracts a defect candidate image which is an image corresponding to a defect candidate of the inspection object from the received light image by performing image processing of the received light image
Data Source
AI summary
A defect inspection device, a defect inspection method, and a computer readable medium accurately and rapidly detect a minute defect and a defect candidate indicated by a signal in a received light image of an inspection object. A defect inspection device includes an image acquisition unit, an input unit, an exposure condition acquisition unit, memory, and a parameter determination unit that determines an image processing parameter for a received light image based on an exposure condition acquired by the exposure condition acquisition unit, a physical feature received by the input unit, and exposure information stored in memory, and an image processing unit extracts a defect candidate image which corresponds to a defect candidate of the inspection object from the received light image by performing image processing of the received light image based on the image processing parameter determined by the parameter determination unit.