Defect Inspection Device Optimizing Extraction Conditions
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Solution Overview
Problem
Existing defect inspection techniques require users to individually set multiple threshold parameters, which is burdensome due to the complexity and number of parameters involved.
Innovation Solution
A defect inspection device that calculates optimized defect extraction conditions using reference values input by the user, reducing the burden of setting parameters by optimizing evaluation values and minimizing false reports.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple threshold parameters are changed individually to identify defects, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The defect inspection device automatically optimizes multiple threshold parameters using an evaluation function that balances actual report detection and false report reduction. The system performs self-adjustment by calculating optimal parameter combinations based on inspection results, eliminating the need for manual individual parameter tuning while maintaining high detection accuracy
Solution Approach 2:
The system changes multiple threshold parameters simultaneously based on optimization results rather than individually. By using an evaluation function that considers both actual report capture and false report reduction, the system determines optimal parameter combinations and applies them collectively, simplifying the parameter setting process while improving measurement precision
2Measurement precision
If multiple threshold parameters are changed individually to identify defects, then measurement precision is improved, but loss of time increases
Solution Approach 1:
The system performs preliminary automatic optimization of multiple threshold parameters before actual defect inspection begins. By pre-calculating optimal parameter combinations using the evaluation function and storing them, the system eliminates time-consuming manual parameter adjustment during operation, achieving both high precision and efficiency
Solution Approach 2:
The defect inspection device automatically optimizes and adjusts parameters without user intervention. The system performs self-adjustment by evaluating inspection results and automatically determining optimal parameter combinations, significantly reducing the time users would otherwise spend on manual parameter setting while maintaining high detection accuracy
3Reliability
If multiple reference values are input by user, then reliability is improved, but ease of operation deteriorates
Solution Approach 1:
The system uses a single evaluation function that serves multiple purposes: it simultaneously optimizes threshold parameters, balances actual report detection with false report reduction, and determines optimal parameter combinations. This multi-functional approach maintains high detection reliability while requiring minimal user input, as the same function handles multiple optimization tasks
Data Source
AI summary
The present invention aims at providing a defect inspection technique capable of setting parameters used for detecting a defect with a less burden to a user. A defect inspection device according to the present invention receives multiple reference values input by the user and calculates a defect extraction condition so as to optimize an evaluation value calculated with the use of the reference values, the number of actual reports, and the number of false reports.