Defect Inspection Threshold Visualization in Semiconductor Manufacturing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In defect inspection for semiconductor manufacturing, setting an appropriate threshold for defect judgment is challenging as users lack guidance on adjusting thresholds based on the relationship between the set threshold and the distribution of defect candidates, leading to difficulties in resetting or adjusting these thresholds effectively.
Innovation Solution
A defect inspection device and display technology that includes an illumination optical system, a detector, and a display unit, which displays a two-dimensional distribution diagram representing the distribution of defect candidates in a three-dimensional feature space with three features as axes and the threshold in one dimension, allowing users to visualize and adjust the threshold more effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a threshold is set for defect judgment, then defect detection capability is improved, but the user cannot grasp the relationship between the threshold and defect candidate distribution, making threshold adjustment difficult
Solution Approach 1:
The patent implements feedback by displaying the threshold position overlaid on the defect candidate distribution diagram. This visual feedback allows users to see exactly where the threshold is positioned relative to the distribution of defect candidates, enabling informed adjustments. The system continuously updates the display to reflect threshold changes and their impact on defect classification.
Solution Approach 2:
The patent introduces a visual intermediary - the distribution diagram - that mediates between the abstract threshold value and the concrete defect detection outcome. This diagram serves as an intermediate representation that makes the relationship between threshold and defect distribution visible, allowing users to intuitively understand and adjust the threshold without directly manipulating numerical values.
2Device complexity
If only comparison results are displayed for threshold setting, then the interface is simple, but users lack guidance for resetting or adjusting the threshold
Solution Approach 1:
The patent adds a visual dimension to the threshold setting interface by displaying a distribution diagram that shows defect candidates plotted against feature values. Instead of only showing one-dimensional comparison results, the system presents a two-dimensional visual representation that reveals the distribution pattern and helps users understand where to position the threshold for optimal performance.
Solution Approach 2:
The patent uses color coding to differentiate between defect candidates that are classified as defects versus those that are not, based on their position relative to the threshold. This visual differentiation through color provides immediate feedback on the threshold's effectiveness and guides users in making appropriate adjustments without increasing interface complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates the setting and adjustment of thresholds, enabling more accurate defect judgment and classification, thereby improving yield management by providing a clear representation of the threshold's relationship with defect candidates.
Implementation Method 1
an illumination optical system that irradiates a sample with a light
Implementation Method 2
a detector that detects a signal obtained from the sample by irradiation with the light or the electron beam
Data Source
AI summary
A defect inspection device is provided with an illumination optical system that irradiates light or an electron beam onto a sample, a detector that detects a signal obtained from the sample through the irradiation of the light or electron beam, a defect detection unit that detects a defect candidate on the sample through the comparison of a signal output by the detector and a prescribed threshold, and a display unit that displays a setting screen for setting the threshold. The setting screen is a two-dimensional distribution map that represents the distribution of the defect candidates in a three dimensional feature space having three features as the axes thereof and includes the axes of the three features and the threshold, which is represented in one dimension.