Deflectable Sealing Frame for Vacuum Substrate Transport
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Solution Overview
Problem
Existing substrate processing systems face challenges in achieving short cycle times due to the need for large volume pumping and slow separation times between process areas, especially when operating in vacuum environments.
Innovation Solution
A transport device with a deflectable sealing frame that temporarily seals small partial volumes, allowing for quick vacuum-tight separation between processing areas by deflecting in the Z-direction, enabling rapid substrate transfer and processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If large volumes are pumped out for vacuum processing, then vacuum conditions are achieved, but separation times between areas increase and cycle times become slow
Solution Approach 1:
The system divides the processing chamber into multiple independently sealable partial volumes using deflectable sealing frames. Each processing area can be separated and evacuated independently, allowing small volumes to be pumped out quickly rather than evacuating large entire chamber volumes, thus reducing separation times while maintaining vacuum reliability.
Solution Approach 2:
The sealing frames are designed to be deflectable rather than fixed, allowing dynamic adjustment of sealing positions. The frames can be deflected into sealing position against chamber walls to create vacuum-tight separations, then returned to non-sealing positions for substrate transport, enabling rapid switching between sealed and open states to minimize cycle times.
2Productivity
If substrates are moved through the system one after another in continuous process, then processing sequence is maintained, but cycle times cannot be shortened due to large volume pumping requirements
Solution Approach 1:
By segmenting the processing system into multiple independently controllable partial volumes, the system can maintain continuous substrate processing while rapidly evacuating and pressurizing small individual chambers. This allows overlapping operations where one area is being processed while another is being prepared, reducing overall cycle times without sacrificing continuous processing capability.
Solution Approach 2:
The system changes the physical state parameters (pressure, volume) of individual partial chambers independently and rapidly. Small chamber volumes allow quick transitions between vacuum and atmospheric states, enabling faster cycle times while maintaining the ability to process substrates continuously through coordinated parameter changes across multiple chambers.
3Loss of time
If processing areas are separated quickly, then cycle times are reduced, but vacuum-tight separation becomes difficult to achieve
Solution Approach 1:
The sealing frames function as flexible membranes that can be deflected into contact with chamber walls to create vacuum-tight seals. This flexible sealing approach allows rapid positioning and sealing actions while maintaining reliable vacuum separations, combining speed with sealing effectiveness through the elastic deformation of the sealing frame material.
Solution Approach 2:
The sealing frames are pre-positioned in non-sealing locations during substrate transport. When separation is required, the frames are quickly deflected into sealing positions against prepared chamber wall surfaces. This preliminary positioning and pre-prepared sealing surface approach enables rapid vacuum-tight separation without compromising seal reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables rapid substrate processing and short cycle times by quickly sealing and unsealing partial areas, minimizing pumping times and allowing for flexible arrangement of processing stations, thus optimizing system efficiency.
Implementation Method 1
A closure device presses on a first sealing surface of the deflectable sealing frame and deflects it in the Z direction perpendicular to the XY plane of the transport direction
Implementation Method 2
Through the contact of the opposite sealing surfaces with the closure device and with the chamber wall, the area within the sealing frame and in relation to the transfer area is sealed in a vacuum-tight manner
Data Source
Figure 1
Figure 2
Figure 3a~3b
AI summary
The invention relates to a device for transporting a substrate (5) into a treatment zone (2, 3, 22) which can be temporarily separated off in a vacuum-tight manner, and to a corresponding method. A transport device (4) transports a substrate (5) in the plane (XY) to a defined treatment zone (2, 3, 22) of a chamber (1). The transport device (4) has a deflectable sealing frame (6) which can be displaced in a Z direction perpendicular to the XY plane. The sealing frame (6) has two opposite sealing surfaces (10, 11) in the Z direction. A closure device (16, 21, 24) pushes against a first sealing surface (10, 11), the second sealing surface (11, 10) thereby pushing against a chamber wall (32, 31), thereby allowing the space of the treatment zone (2, 3, 22) of the chamber (1) to be sealed.