Deflection Sensitivity Calculation for Electron Beam Irradiation
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Solution Overview
Problem
The deflection sensitivity of deflectors in electron beam irradiation apparatuses is not constant, leading to inconsistent electron beam irradiation, which can result in the electron beam being irradiated to unintended areas rather than the desired areas during semiconductor device manufacturing processes.
Innovation Solution
A deflection sensitivity calculation method and system that calculates deflection sensitivity by irradiating an adjustment plate with an electron beam, detecting the current, forming an image, and calculating the number of pixels corresponding to the adjustment plate, using formulas to determine deflection sensitivity based on the size of the adjustment plate, scanning width, and image pixels.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the deflection sensitivity of the deflector is not calibrated, then the apparatus can operate without additional measurement steps, but the electron beam irradiation precision deteriorates due to variable deflection sensitivity
Solution Approach 1:
The adjustment plate serves a dual function: it is both the measurement target and the detection device. The plate's own characteristics (size, position) are used to automatically determine deflection sensitivity through image analysis, eliminating the need for separate measurement instruments or complex calibration equipment.
Solution Approach 2:
An optical image of the adjustment plate is captured and analyzed to determine deflection sensitivity. Instead of directly measuring physical deflection parameters, the system creates a visual copy (image) of the plate's position and uses image processing to extract the sensitivity information, simplifying the measurement process.
2Manufacturing precision
If the deflection parameter scanning range is increased to cover the entire adjustment plate, then the measurement completeness is improved, but the measurement time increases
Solution Approach 1:
The system scans the deflection parameter across the full range to ensure complete coverage of the adjustment plate, then uses image processing to identify only the relevant portion (the plate itself) for calculation. This excessive scanning ensures no edge cases are missed while the selective image analysis maintains efficiency.
Solution Approach 2:
The patent replaces time-consuming manual measurement or step-by-step calibration procedures with automated optical imaging and digital image processing. The mechanical scanning is performed once to capture the full range, then computational methods rapidly extract the required sensitivity data from the image.
3Reliability
If the deflection sensitivity is not adjusted for external conditions, then the operation is simpler, but the irradiation accuracy deteriorates due to magnetic field fluctuations and equipment changes
Solution Approach 1:
The system establishes a feedback mechanism where the adjustment plate's detected position provides real-time information about actual deflection sensitivity. This measured sensitivity can then be used to adjust control parameters or compensate for drift caused by external conditions, ensuring consistent irradiation accuracy despite environmental changes.
Solution Approach 2:
The patent measures deflection sensitivity under actual operating conditions rather than assuming fixed theoretical values. By detecting the plate's position and calculating sensitivity based on real-world performance, the system adapts to changes in magnetic fields, equipment aging, or environmental factors, maintaining reliability without requiring complex manual recalibration procedures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method and system ensure accurate and consistent deflection sensitivity calculation, allowing for precise adjustment of the electron beam irradiation area, even when deflection sensitivity varies due to startup, equipment changes, or external magnetic field fluctuations, thereby maintaining precise irradiation control.
Implementation Method 1
the adjustment plate detecting a current corresponding to the irradiated electron beam
Data Source
AI summary
According to one embodiment, provided is a deflection sensitivity calculation method for calculating deflection sensitivity of a deflector in an electron beam irradiation apparatus that irradiates an irradiation object on a stage with an electron beam by causing the deflector to deflect the electron beam, the deflection sensitivity calculation method including: irradiating an area that covers an adjustment plate with an electron beam by scanning a deflection parameter that controls deflection of the deflector in a predetermined width; detecting a current value detected from the adjustment plate; forming an image corresponding to the detected current value, a number of pixels of the image being known; calculating the number of pixels of a portion corresponding to the adjustment plate in the formed image; and calculating the deflection sensitivity of the deflector.