Deflector Electrode Potential Monitoring for Discharge Site Detection
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Solution Overview
Problem
Existing electron beam drawing apparatuses face challenges in accurately detecting discharge sites, particularly those caused by electrodes in the deflector systems, leading to fluctuations in the electron beam path and potential drawing pattern errors.
Innovation Solution
A method and apparatus for detecting discharge sites in a charged particle beam emitting apparatus, utilizing switchable modes where the first mode deflects a charged particle beam using electrodes and the second mode acquires data on electrode potentials without applying voltages, allowing for the detection of discharges by identifying fluctuations exceeding a predetermined threshold.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a discharge detector is used to detect discharges in an electron beam drawing apparatus, then discharge detection capability is provided, but discharge detection accuracy is insufficient particularly for discharges caused by deflector electrodes
Solution Approach 1:
The deflector system is divided into multiple independent electrode groups, with each group equipped with its own discharge detector. This segmentation allows each detector to monitor a specific electrode group, enabling accurate identification of which electrode is causing the discharge. The segmented detection approach resolves the inability of a single detector to accurately locate discharges in the complex deflector system.
Solution Approach 2:
A control unit acts as an intermediary that receives discharge detection signals from multiple discharge detectors and determines the specific electrode causing the discharge based on the pattern of detected discharges. The control unit processes the information from multiple detectors to identify the root cause, serving as a mediator between the detectors and the decision-making process for electrode replacement.
2Measurement precision
If visual inspection or microscope search is used to identify discharge locations, then discharge sites can be found, but the process is time-consuming and labor-intensive
Solution Approach 1:
The discharge detection system operates automatically without requiring manual visual inspection or microscope examination. The discharge detectors continuously monitor the electrode groups and automatically identify discharge locations, eliminating the need for time-consuming manual search processes while maintaining high accuracy in locating discharge sites.
Solution Approach 2:
The manual visual inspection method is replaced with an automated electrical detection system. Instead of using human operators with microscopes to visually search for discharge marks, the system uses discharge detectors that electrically monitor the electrode groups and automatically identify discharge locations, substituting mechanical/manual processes with automated electronic detection.
3Reliability
If conventional discharge detection methods are used, then some discharges can be detected, but discharges caused by deflector electrodes remain undetected
Solution Approach 1:
The discharge detection system is designed with multiple discharge detectors that can universally monitor all electrode groups in the apparatus, including the deflector electrodes. Each detector is configured to monitor specific electrode groups, creating a comprehensive monitoring network that can detect discharges from any component throughout the electron beam drawing apparatus, not just from specific locations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly improves discharge detection accuracy, enabling the identification of discharge locations that may not be detectable with conventional methods, thereby reducing drawing pattern errors and facilitating the replacement of faulty components.
Implementation Method 1
a beam of charged particles is deflected by applying voltages to a plurality of electrodes
Implementation Method 2
detecting an occurrence of a discharge when a fluctuation in potential indicated by data items relating to one of the electrodes exceeds a predetermined threshold value
Data Source
AI summary
A method for detecting a discharge site for a charged particle beam emitting apparatus includes switchable first and second modes. The first mode enables a beam of charged particles to be deflected by applying voltages to electrodes. The second mode enables acquisition of data items indicative of potential of each of the electrodes while the beam is being emitted without applying the voltages. The method includes, in the second mode, detecting an occurrence of a discharge when a fluctuation in potential indicated by data items relating to one of the electrodes exceeds a predetermined threshold value; and detecting a site corresponding to the electrode, as a site having an occurrence of the discharge.