Deflector Redirects Heating Light for Substrate Temperature Uniformity
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate processing apparatuses face challenges in achieving uniform substrate temperature distribution during film formation, particularly due to uneven heating patterns from the heating elements, which affects the consistency of the films deposited on substrates.
Innovation Solution
The apparatus incorporates a deflector mechanism that redirects heating light from the heater towards a rotation shaft, ensuring selective heating of the substrate position where temperature uniformity is maintained, utilizing a reflector or condensing lens configuration to focus heat efficiently.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If heating light is emitted directly from the heater without deflection, then the heating coverage is broad, but the temperature uniformity across the substrate is poor
Solution Approach 1:
A deflector is introduced as an intermediary component between the heater and the substrate. The deflector redirects heating light from the heater toward the rotation shaft, creating a controlled heating path that improves temperature uniformity without requiring a completely redesigned heating system.
Solution Approach 2:
The deflector concentrates heating light on specific local regions of the substrate by directing it toward the rotation shaft. This creates localized heating zones that can be precisely controlled, improving overall temperature uniformity across different areas of the substrate during rotation.
2Manufacturing precision
If the substrate is heated uniformly across all positions, then the film formation quality improves, but the energy efficiency decreases due to overheating in already warm regions
Solution Approach 1:
The substrate is rotated periodically during the heating process, allowing different regions to sequentially pass through the heating zone. This periodic exposure ensures that all areas receive appropriate heating over time, achieving uniform film formation while avoiding continuous overheating of any single region.
Solution Approach 2:
The deflector directs heating light to specific local positions on the substrate based on its rotation, providing targeted heating only where needed at each moment. This localized approach improves energy efficiency by avoiding unnecessary heating of regions that already have sufficient temperature.
3Temperature
If a deflector is added to redirect heating light, then the temperature uniformity improves, but the device complexity increases
Solution Approach 1:
The deflector serves as a simple intermediary component that redirects existing heating light without requiring fundamental changes to the heater or substrate processing mechanism. This minimal addition achieves temperature uniformity improvement while keeping the overall system relatively simple.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances temperature uniformity across the substrate, improving the consistency and quality of films formed by selectively heating the substrate position, thereby addressing the issue of uneven heating patterns.
Implementation Method 1
a deflector configured to deflect heating light emitted from the heater toward the rotation shaft
Implementation Method 2
utilizing a reflector or condensing lens configuration to focus heat efficiently
Data Source
AI summary
A substrate processing apparatus includes: a rotary table provided in a processing container; a stage provided on the rotary table to place a substrate thereon, and configured to revolve by a rotation of the rotary table; a heater configured to heat the substrate placed on the stage; and a rotation shaft configured to rotate together with the rotary table and support the stage to be rotatable; and a deflector configured to deflect heating light emitted from the heater toward the rotation shaft.