Deflector System for Capturing Target Material in EUV Light Sources
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Solution Overview
Problem
In systems where liquid or partially liquid materials travel and collide with surfaces, such as in extreme ultraviolet (EUV) light sources, splashing and scattering occur, leading to contamination of objects and degradation of system performance due to the reflective properties being altered by the scattered material.
Innovation Solution
A target material receptacle with a passageway and a deflector system comprising multiple deflector elements oriented at a specific acute angle relative to the material path, separated by a distinct distance, to minimize splashing and scattering by decelerating the material gently and reducing adhesion to the deflector surfaces through surface features like ripples or coatings.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a traditional impact surface is used to capture target material, then the material can be received, but splashing and scattering occur causing contamination and performance degradation
Solution Approach 1:
The impact surface is divided into multiple discrete deflector elements arranged in an array, each element independently intercepting and deflecting portions of the target material stream. This segmentation prevents splashing and scattering that would occur on a continuous surface, thereby reducing contamination while maintaining reliable material capture.
Solution Approach 2:
The deflector elements are oriented at oblique angles relative to the target material path, introducing angular geometry to intercept materials traveling in a linear path. This dimensional approach deflects materials away from sensitive regions without requiring a perpendicular impact surface, reducing splashing while maintaining capture effectiveness.
2Quantity of substance
If deflector elements are placed close together to maximize coverage, then more material can be captured, but adhesion and accumulation on surfaces increase
Solution Approach 1:
Different regions of the deflector elements have optimized local properties - the leading edges are positioned to intercept materials at optimal angles, while the spacing between elements creates regions of reduced adhesion. This local quality optimization allows high capture efficiency while minimizing material accumulation on surfaces.
Solution Approach 2:
The deflector elements are positioned and oriented to create uniform flow conditions across the target material stream, ensuring that materials are deflected consistently without creating low-pressure zones or stagnation regions where adhesion and accumulation would occur.
3Quantity of substance
If deflector elements are oriented perpendicular to the material path for maximum interception, then material capture is maximized, but splashing and scattering are intensified
Solution Approach 1:
The deflector elements are oriented at asymmetric oblique angles rather than perpendicular to the material path. This asymmetric orientation intercepts the material stream effectively while directing the deflected materials away from regions where splashing and scattering would cause contamination, thus maximizing capture while minimizing harmful effects.
Solution Approach 2:
The deflector elements are designed to convert the potentially harmful perpendicular impact into a beneficial oblique deflection. By orienting elements at angles that guide materials away from sensitive regions, the system transforms what would be contaminating splashes into controlled deflections that maintain material capture while eliminating harmful scattering.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively captures more of the target material, reducing contamination and maintaining system performance by minimizing splashing and scattering, thus ensuring the EUV light output is not compromised.
Implementation Method 1
decelerating the material gently
Implementation Method 2
reducing adhesion to the deflector surfaces through surface features like ripples or coatings
Data Source
AI summary
A target material receptacle includes a structure including a passageway that extends in a first direction, the passageway configured to receive target material that travels along a target material path; and a deflector system configured to receive target material from the passageway. The deflector system includes a plurality of deflector elements. Each deflector element is oriented at a first acute angle relative to a direction of travel of an instance of the target material that travels along the target material path, and each deflector element in the deflector system is separated from a nearest deflector element by a distance along a second direction that is different from the first direction.