Deformable Film Pressure Sensor with Magnetic and Piezoelectric Layers

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Solution Overview

Problem

Existing sensors face challenges in achieving high precision for pressure sensing due to limitations in controlling strain and stress, often resulting in low sensitivity and a narrow range of detectable stress, especially when initial strain is present during manufacturing.

Innovation Solution

The sensor design incorporates a deformable film with a first sensor portion using magnetic layers for strain sensing and a first element portion using a piezoelectric layer to apply stress, operating on different mechanisms to enhance sensing precision by controlling the strain of the film.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a single mechanism is used for both sensing and stress application, then device complexity is reduced, but sensing precision and sensitivity are limited due to inability to independently control strain

Engineering Contradiction:
Improvesensing precisionVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The sensor is divided into two distinct functional portions: a first sensor portion using magnetic layers for strain sensing and a first element portion using a piezoelectric layer for stress application. This segmentation allows independent control of strain and stress, resolving the contradiction by enabling precise sensing through separate functional zones rather than a unified structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The deformable film serves multiple functions: it acts as the sensing element for the magnetic sensor portion and as the stress-receiving element for the piezoelectric actuator portion. This multi-functionality allows a single component to support both sensing and actuation roles, reducing overall device complexity while maintaining the ability to independently control strain through separate control of each portion.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Measurement precision

If magnetic layers and piezoelectric layer are used together, then sensing precision is improved through independent control, but device complexity increases due to multiple mechanisms

Engineering Contradiction:
Improvesensing precisionVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

Different portions of the sensor have different functional qualities: the first sensor portion is optimized for magnetic sensing with magnetic layers, while the first element portion is optimized for stress application with piezoelectric material. This local differentiation allows each region to perform its specific function with high efficiency, achieving precise strain control without requiring the entire device to be complex.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The sensor combines magnetic layers and piezoelectric layer in a composite structure where each material contributes its unique properties. The magnetic layers provide sensitive strain detection capability while the piezoelectric layer provides precise stress application, creating a composite system that achieves high sensing precision through material complementarity rather than mechanical complexity.

Inventive Principle:
Principle #40Composite materials

3Measurement precision

If initial strain is present during manufacturing, then manufacturing is simplified, but sensing precision deteriorates due to reduced sensitivity and narrow detectable stress range

Engineering Contradiction:
Improvesensing precisionVSAvoidease of manufacture
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The patent extracts the strain control function from the manufacturing process and places it in the operational phase through the piezoelectric layer. By separating strain application from manufacturing, the system can achieve zero or controlled initial strain during operation even though manufacturing may introduce some initial strain, thus improving sensing precision without significantly complicating manufacturing.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The piezoelectric layer enables dynamic change of the strain parameter in the deformable film during sensor operation. By controlling the electrical voltage applied to the piezoelectric layer, the system can adjust the strain state to compensate for any initial strain from manufacturing, thereby maintaining high sensing precision across different manufacturing conditions without requiring extremely precise manufacturing processes.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration increases sensing precision by allowing independent control of the sensor element, improving sensitivity and expanding the range of detectable stress, enabling accurate pressure sensing with reduced initial strain effects.

Implementation Method 1

a first element portion using a piezoelectric layer to apply stress

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

a first sensor portion using magnetic layers for strain sensing

Methodology Applied
Scientific EffectMagnetoelastic effect: Magnetoelastic Effects

Data Source

PatentUS10060818B2Pressure sensor and electronic device comprising a pressure sensor
Publication Date: 2018.08.28 KK TOSHIBA
  • US10060818B2 patent drawing
  • US10060818B2 patent drawing
  • US10060818B2 patent drawing

AI summary

A sensor includes a first film, a first sensor portion, and a first element portion. The first film is deformable. The first sensor portion is provided at the first film. The first sensor portion includes a first magnetic layer, a second magnetic layer provided between the first film and the first magnetic layer, and a first intermediate layer provided between the first magnetic layer and the second magnetic layer. The first element portion includes a first piezoelectric layer fixed to the first film.