Deformable Film Pressure Sensor with Magnetic and Piezoelectric Layers
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Solution Overview
Problem
Existing sensors face challenges in achieving high precision for pressure sensing due to limitations in controlling strain and stress, often resulting in low sensitivity and a narrow range of detectable stress, especially when initial strain is present during manufacturing.
Innovation Solution
The sensor design incorporates a deformable film with a first sensor portion using magnetic layers for strain sensing and a first element portion using a piezoelectric layer to apply stress, operating on different mechanisms to enhance sensing precision by controlling the strain of the film.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single mechanism is used for both sensing and stress application, then device complexity is reduced, but sensing precision and sensitivity are limited due to inability to independently control strain
Solution Approach 1:
The sensor is divided into two distinct functional portions: a first sensor portion using magnetic layers for strain sensing and a first element portion using a piezoelectric layer for stress application. This segmentation allows independent control of strain and stress, resolving the contradiction by enabling precise sensing through separate functional zones rather than a unified structure.
Solution Approach 2:
The deformable film serves multiple functions: it acts as the sensing element for the magnetic sensor portion and as the stress-receiving element for the piezoelectric actuator portion. This multi-functionality allows a single component to support both sensing and actuation roles, reducing overall device complexity while maintaining the ability to independently control strain through separate control of each portion.
2Measurement precision
If magnetic layers and piezoelectric layer are used together, then sensing precision is improved through independent control, but device complexity increases due to multiple mechanisms
Solution Approach 1:
Different portions of the sensor have different functional qualities: the first sensor portion is optimized for magnetic sensing with magnetic layers, while the first element portion is optimized for stress application with piezoelectric material. This local differentiation allows each region to perform its specific function with high efficiency, achieving precise strain control without requiring the entire device to be complex.
Solution Approach 2:
The sensor combines magnetic layers and piezoelectric layer in a composite structure where each material contributes its unique properties. The magnetic layers provide sensitive strain detection capability while the piezoelectric layer provides precise stress application, creating a composite system that achieves high sensing precision through material complementarity rather than mechanical complexity.
3Measurement precision
If initial strain is present during manufacturing, then manufacturing is simplified, but sensing precision deteriorates due to reduced sensitivity and narrow detectable stress range
Solution Approach 1:
The patent extracts the strain control function from the manufacturing process and places it in the operational phase through the piezoelectric layer. By separating strain application from manufacturing, the system can achieve zero or controlled initial strain during operation even though manufacturing may introduce some initial strain, thus improving sensing precision without significantly complicating manufacturing.
Solution Approach 2:
The piezoelectric layer enables dynamic change of the strain parameter in the deformable film during sensor operation. By controlling the electrical voltage applied to the piezoelectric layer, the system can adjust the strain state to compensate for any initial strain from manufacturing, thereby maintaining high sensing precision across different manufacturing conditions without requiring extremely precise manufacturing processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration increases sensing precision by allowing independent control of the sensor element, improving sensitivity and expanding the range of detectable stress, enabling accurate pressure sensing with reduced initial strain effects.
Implementation Method 1
a first element portion using a piezoelectric layer to apply stress
Implementation Method 2
a first sensor portion using magnetic layers for strain sensing
Data Source
AI summary
A sensor includes a first film, a first sensor portion, and a first element portion. The first film is deformable. The first sensor portion is provided at the first film. The first sensor portion includes a first magnetic layer, a second magnetic layer provided between the first film and the first magnetic layer, and a first intermediate layer provided between the first magnetic layer and the second magnetic layer. The first element portion includes a first piezoelectric layer fixed to the first film.


