Deformable MEMS Waveguide for Monolithic Optical Beam Steering

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Solution Overview

Problem

Existing microoptoelectromechanical systems (MOEMS) for wavelength tunable components, such as sources, filters, and detectors, often rely on free space optics, which limits their integration and efficiency in optical waveguide domains, necessitating the development of MOEMS elements that can operate within the waveguide domain without air-waveguide interfaces.

Innovation Solution

The use of MEMS actuated suspended waveguide structures that deform to change the orientation and position of optical beams, allowing for wavelength tuning and filtering within a monolithically integrated circuit, eliminating the need for free space optics by employing deformable regions between waveguide sections to control optical beam positioning and orientation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If free space optics are used in MOEMS devices, then optical beam control is achieved, but integration with optical waveguide domains is limited and air-waveguide interfaces create unwanted reflections and crosstalk

Engineering Contradiction:
Improveintegration with optical waveguide domainVSAvoidair-waveguide interface requirements
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

A deformable membrane structure serves as an intermediary between the optical waveguide domain and the optical beam control mechanism. The membrane can be deformed to control optical beams while remaining integrated within the waveguide domain, eliminating the need for air-waveguide interfaces and their associated reflections and crosstalk issues.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces traditional free space optical mechanisms with a mechanically deformable membrane structure that can be actuated to control optical beams. This mechanical substitution allows beam control to be achieved directly within the waveguide domain without requiring free space optics.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Ease of manufacture

If multiple discrete components and hybrid assembles are used, then optical functions are achieved, but device footprint and manufacturing complexity increase

Engineering Contradiction:
Improvemonolithic integrationVSAvoiddevice footprint
Core Design Contradiction:
Ease of manufactureVSArea of stationary object

Solution Approach 1:

The patent merges multiple optical functions (beam control, wavelength tuning, filtering) into a single monolithic MOEMS device structure. The deformable membrane integrates with waveguide sections to provide multiple functions simultaneously, eliminating the need for separate discrete components and hybrid assemblies, thereby reducing both manufacturing complexity and device footprint.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The deformable membrane structure serves multiple functions: it acts as a waveguide section, a beam control element, and enables wavelength tuning and filtering capabilities. This multi-functionality allows a single compact structure to replace what would traditionally require multiple discrete components.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Adaptability or versatility

If deformable structures are introduced for beam steering, then wavelength tuning capability is achieved, but device complexity increases

Engineering Contradiction:
Improvewavelength tuning capabilityVSAvoiddeformable structure actuation
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent employs a dynamically deformable membrane structure that can change its shape or position to control optical beam properties. The membrane's deformability is actuated through integrated actuators, enabling wavelength tuning and beam steering capabilities while maintaining a relatively simple overall device structure compared to traditional multi-component systems.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables compact, low-power, and cost-effective wavelength tunable components with enhanced integration and flexibility, suitable for diverse applications including optical switching, sensors, and data transmission, while reducing unwanted reflections and crosstalk.

Implementation Method 1

at least one third region between the first and second regions, which is deformable and without physical discontinuities for at least one part of the optical beam; wherein the deformation of the third region results in the optical beam, received in the second region, having a different orientation and/or position than it initially had

Methodology Applied
Scientific EffectDeformation: Deformation

Data Source

PatentUS10962716B2Microelectromechanically actuated deformable optical beam steering for wavelength tunable optical sources, filters, and detectors
Publication Date: 2021.03.30 VALORBEC PARTNERSHIP
  • US10962716B2 patent drawing
  • US10962716B2 patent drawing
  • US10962716B2 patent drawing

AI summary

Wavelength division multiplexing (WDM) has enabled telecommunication service providers to fully exploit the transmission capacity of optical fibers. State of the art systems in long-haul networks now have aggregated capacities of terabits per second. Moreover, by providing multiple independent multi-gigabit channels, WDM technologies offer service providers with a straight forward way to build networks and expand networks to support multiple clients with different requirements. In order to reduce costs, enhance network flexibility, reduce spares, and provide re-configurability many service providers have migrated away from fixed wavelength transmitters, receivers, and transceivers, to wavelength tunable transmitters, receivers, and transceivers as well as wavelength dependent add-drop multiplexer, space switches etc. However, to meet the competing demands for improved performance, increased integration, reduced footprint, reduced power consumption, increased flexibility, re-configurability, and lower cost it is desirable to exploit/adopt monolithic optical circuit technologies, hybrid optoelectronic integration, and microelectromechanical systems (MEMS).