Deformable Mirror Actuator Arrangement for Aberration Correction
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Solution Overview
Problem
Existing deformable mirrors with uniformly arranged actuators are complex to manufacture and control, leading to increased costs and inefficiencies in correcting exposure aberration in semiconductor and astronomical applications.
Innovation Solution
Actuators are arranged on concentric circles denser towards the outer periphery of the mirror, with equal intervals in circumferential directions, optimizing the arrangement for high accuracy and minimizing the number of actuators required.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If actuators are uniformly and densely arranged on the mirror back surface, then mirror deformation accuracy is improved, but device complexity and manufacturing cost increase
Solution Approach 1:
The patent applies local quality by varying the density of actuators across different regions of the mirror. Specifically, actuators are arranged with higher density in the outer peripheral region and lower density in the central region, matching the local requirements for deformation control. This non-uniform distribution optimizes correction accuracy where needed while reducing complexity in regions requiring less precision.
Solution Approach 2:
The patent segments the mirror surface into multiple radial regions (first, second, and third regions from center to periphery) with different actuator densities. Each region is independently optimized with appropriate actuator spacing, allowing the system to achieve overall high accuracy without uniformly dense actuator coverage across the entire mirror surface.
2Manufacturing precision
If actuators are uniformly and densely arranged on the mirror back surface, then mirror deformation accuracy is improved, but manufacturing cost increases
Solution Approach 1:
By implementing non-uniform actuator density with higher concentration in the outer peripheral region and lower concentration in the central region, the patent reduces the total number of actuators required while maintaining correction accuracy. This directly lowers manufacturing costs without sacrificing the precision needed for exposure aberration correction.
Solution Approach 2:
The patent applies partial action by concentrating actuators only in regions where they are most needed (outer peripheral region with higher density) rather than uniformly distributing them across the entire mirror surface. This optimized placement achieves the required correction accuracy with fewer total actuators, reducing manufacturing expenditure.
3Manufacturing precision
If actuators are uniformly and densely arranged on the mirror back surface, then mirror deformation accuracy is improved, but control system complexity increases
Solution Approach 1:
The control system manages actuators with different local densities by region, applying appropriate control algorithms tailored to each radial zone. The first control algorithm handles the outer peripheral region with higher actuator density, while the second control algorithm manages the central region with lower density, simplifying overall control architecture.
Solution Approach 2:
The control system is segmented into multiple control algorithms corresponding to different mirror regions. This regional segmentation allows each control algorithm to be optimized for its specific zone's actuator density and deformation requirements, reducing the complexity of managing the entire actuator array as a single uniform system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This arrangement achieves the desired mirror deformation accuracy with fewer actuators, reducing manufacturing complexity, control system complexity, and costs while maintaining high correction precision.
Implementation Method 1
a plurality of actuators configured to deform a shape of a reflecting surface of the mirror
Data Source
AI summary
An optical device includes a mirror, and a plurality of actuators configured to deform a shape of a reflecting surface of the mirror. At least some of the plurality of actuators are arranged on a plurality of concentric circles arranged in such a manner that the concentric circles are arranged denser as positions of the concentric circles are located farther from a center of the reflecting surface of the mirror, and at least some of the plurality of actuators are arranged at equal intervals in circumferential directions of the concentric circles.