Deformable Mirror Monolithic Lattice Support
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing deformable mirrors in EUV lithographic apparatuses face challenges with aberrations due to thermal changes and lack of mechanical stability, leading to unsuitable performance under high thermal loads, and existing solutions suffer from deformation cross-talk and material expansion issues.
Innovation Solution
A deformable mirror system with a monolithic support structure featuring a regular 2-D lattice arrangement of cavities and pillars, allowing for surface normal actuation and mechanical decoupling, which enables controlled deformation and reduces cross-talk, using actuators like pneumatic, hydrostatic, or Lorentz actuators for precise mirror adjustment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a deformable mirror is used to correct aberrations, then the ability to correct wave front distortions is improved, but mechanical stability and stiffness across the mirror surface deteriorate
Solution Approach 1:
The support structure is segmented into multiple pillars arranged in a regular 2-D lattice pattern across the mirror surface. Each pillar independently supports a local region of the mirror, allowing localized deformation while maintaining global mechanical stability. This segmentation enables the mirror to correct wave front distortions without sacrificing overall structural rigidity.
2Ease of operation
If surface parallel actuation is used to deform the mirror, then the ability to adjust the mirror surface is improved, but deformation cross-talk between adjacent actuators increases
Solution Approach 1:
Each actuator is positioned to exert force locally on a specific pillar, and each pillar independently supports a localized region of the mirror. This local quality arrangement ensures that actuation of one pillar does not significantly affect adjacent regions, minimizing deformation cross-talk while maintaining ease of surface adjustment.
3Strength
If the mirror is rigidly supported to maintain mechanical stability, then structural stiffness is improved, but the ability to deform the mirror surface locally deteriorates
Solution Approach 1:
The support structure transitions from a rigid, monolithic configuration to a dynamic system where pillars can independently deform under actuator force. The pillars are designed to bend elastically, allowing localized mirror deformation while the overall lattice structure maintains global stiffness. This dynamic capability enables surface deformation without sacrificing structural strength.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system provides improved mechanical stability and reduced aberrations, enabling effective correction of 3rd-order distortions and maintaining performance under varying thermal conditions, while minimizing cross-talk and material expansion issues.
Implementation Method 1
A deformable mirror system with a monolithic support structure featuring a regular 2-D lattice arrangement of cavities and pillars, allowing for surface normal actuation
Data Source
AI summary
A deformable mirror system (300, 400, 500), comprising a monolithic support structure (310, 410, 510), comprising a first side (311) configured to receive a mirror (350, 450, 550); and a second side (312) configured to receive a plurality of actuators (460, 560) such that the actuators are positioned to enable selective deformation of a reflective surface (351, 451, 551) of the mirror.