Deformable Mirror Simultaneous Capacitance Detection
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Solution Overview
Problem
Conventional deformable mirrors with multiple control electrodes require sequential measurement of capacitance for each electrode, making it difficult to determine the shape of the reflecting surface simultaneously and efficiently, especially at high speeds.
Innovation Solution
A deformable mirror design that includes a deformable section with a reflecting surface and multiple second electrodes, a driving force unit for applying electric potential differences, and a capacitance detecting unit capable of simultaneously measuring capacitances between the first electrode and multiple second electrodes, using reference signals with identifying factors to separate detection signals based on frequency or phase.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If sequential measurement of capacitance for each control electrode is used, then measurement precision is maintained, but measurement speed deteriorates
Solution Approach 1:
The patent combines multiple capacitance measurements into a single simultaneous measurement by electrically connecting multiple control electrodes to form a composite electrode. This allows the capacitance between the deformable mirror and the composite electrode to be measured in one operation, thereby maintaining measurement precision while significantly improving measurement speed.
Solution Approach 2:
The composite electrode structure serves multiple functions: it acts as both a control electrode for deforming the reflecting surface and as a sensing electrode for measuring capacitance. This multi-functionality eliminates the need for separate measurement electrodes, enabling simultaneous deformation control and shape measurement.
2Adaptability or versatility
If multiple control electrodes are used to change shape freely, then adaptability is improved, but device complexity increases
Solution Approach 1:
Multiple control electrodes are electrically connected and merged into a single composite electrode structure. This reduces the complexity of individual electrode connections while maintaining the ability to control different regions of the deformable mirror by applying voltages to different segments of the composite electrode.
Solution Approach 2:
The composite electrode is divided into multiple segments corresponding to different control regions. By applying voltages to specific segments, the patent enables independent control of different areas of the reflecting surface, maintaining shape control flexibility while using a unified electrode structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables simultaneous detection of deformation at multiple positions on the reflecting surface, improving measurement speed and accuracy, allowing for continuous and simultaneous monitoring and control of the surface shape.
Implementation Method 1
The reflecting surface is deformed by an electrostatic driving force which is generated by applying a voltage between the upper electrode 6 and the control electrode 2
Implementation Method 2
it is possible to calculate an amount of deformation of the reflecting surface by calculating a capacitance between the upper electrode 6 and the control electrode 2
Data Source
AI summary
A deformable mirror includes a deformable section on which a reflecting surface and a COM electrode are formed, a fixing section which fixes the deformable section, a driving and sensing electrode (driving force generating unit) which has a plurality of driving and sensing electrodes provided facing the COM electrode, and which drives the deformable section by applying an electric potential difference between the COM electrode and the driving and sensing electrode, and a capacitance detecting circuit which detects simultaneously a plurality of capacitances between the COM electrode and the driving and sensing electrode.